Flow Control
GF120X-110948
Brooks Instrument Metal-Sealed Thermal Mass Flow Controller
About this part
Brooks Instrument GF120X-110948 is a configured GF120-series thermal mass flow controller for high-purity gas service. Brooks model-code tables identify the GF120X stem as a high-purity/ultra-high-purity digital GF120 platform with a fixed gas-and-range configuration that is not MultiFlo capable. The 110948 suffix is not publicly decoded; the exact gas, range, special application, valve, fitting and communication interface therefore remain configuration-specific
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument GF100 Series (GF120)
Part numberGF120X-110948
Product familyGF120 Series
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Manufacturer | Brooks Instrument |
| Exact configured identifier | GF120X-110948 |
| Device family | GF100 Series metal-sealed high-purity and ultra-high-purity thermal mass flow controllers and meters for gases |
Model code
| Configurability code | The X position denotes a non-MultiFlo configuration requiring a specific gas and range; the complete special-application configuration is not encoded by the published identifier suffix |
Applications
| Manufacturer family applications | Semiconductor, MOCVD and other high-purity gas-flow control applications |
Flow
| Documented GF120 contexts | Current Brooks tables list 3 sccm to 55 slpm N2-equivalent for standard GF120 configurations, 4 to 25 sccm for GF120XSL and above 25 sccm through 1 slpm for GF120XSD. The exact suffix does not establish which context applies |
Performance
| Analog/DeviceNet family accuracy context | ±1% of set point over 35-100% full scale and ±0.35% full scale over 2-35%, based on factory N2 calibration, for applicable configurations |
| EtherCAT family accuracy context | The EtherCAT data sheet lists ±1% of set point over 20-100% full scale and ±0.2% full scale over 2-20% for standard GF100/GF120/GF125 configurations; GF120XSL/GF120XSD retain the 35% and 0.35% thresholds. The installed interface is not established |
| Family repeatability context | ±0.15% of set point over 5-100% and ±0.015% full scale over 2-5% in current Brooks family data sheets |
| Settling-time context | Brooks lists 700 ms for standard GF120 normally closed-valve configurations and less than 3 seconds for GF120XSL/GF120XSD configurations; exact valve and special application are unresolved |
Materials
| Wetted-path context | The GF100 Series uses an all-metal high-purity path with SEMI F20 HP-compliant wetted materials; exact components vary with valve and configuration |
Controls
| Documented family interfaces | RS-485/analog, DeviceNet and EtherCAT are documented for GF100 Series configurations. The full product description code and connector must establish the installed interface |
Environment
| Family operating-temperature context | 10-50 °C for the applicable standard and Safe Delivery System configurations in current family data sheets |
What Does GF120X-110948 Mean?
The identifier contains a recognizable Brooks model-code stem followed by a configured-part suffix rather than the complete published product description code.
| Segment | Field | Interpretation |
|---|---|---|
| GF | Base model code | High-purity/ultra-high-purity digital mass flow controller platform. |
| 120 | Package and finish option | GF120 option. Current Brooks tables associate this position with a 3 sccm-55 slpm N2-equivalent standard envelope, 700 ms response and 5 µin Ra finish; those table values do not establish the configured gas, range or valve. |
| X | Configurability | Not MultiFlo capable; a specific gas and range are required. Public tables pair X with a supported special-application option, but that complete field is absent from this identifier. |
| 110948 | Configured-part suffix | Not decoded by the public Brooks product-description tables. It does not establish the special application, gas, range, valve, fitting, downstream condition, sensor orientation, communications option or customer-special request. |
Configuration Verification Notes
Archived exact-unit descriptions contain configuration details that are incompatible with the current public Brooks ordering tables. These details require a readable unit label, full product description code, build sheet or calibration record.
| Configuration field | Archived exact-unit description | Manufacturer boundary |
|---|---|---|
| Model | GF120XSDO | Brooks tables define SD as a Safe Delivery System option requiring a normally closed valve; O denotes a normally open valve and is unavailable with SD. The archived model text therefore cannot be decoded literally. |
| Gas and range | N2, 2000 sccm | The current GF120XSD table is limited to above 25 sccm through 1 slpm N2-equivalent. Do not assert the archived 2000 sccm description as an official GF120XSD specification. |
| Communication | EtherNet/IP | Brooks' public GF100 Series library documents RS-485/analog, DeviceNet and EtherCAT, not EtherNet/IP. Connector or configuration-record evidence is required. |
| Fitting | Surface mount | Surface-mount GF120 configurations are family-supported, but the exact seal type, body width and footprint are not established. |
| OEM cross-reference | Applied Materials 0190-91650-04 | The 0190-91650 base number also appears with another GF120X configured identifier. It is observed compatibility context, not a unique exact-part alias. |
Documentation Downloads
Local PDF copies
Brooks GF100 Series Analog and DeviceNet Data Sheet — Data-Sheet-GF100-EN/2025-07
Local PDF download
PDF4.2 MB
Brooks GF100 Series Installation and Operation Manual — 541B137AAG/2026-07
Local PDF download
PDF6.1 MB
Brooks GF100 Series EtherCAT Data Sheet — Data-Sheet-GF100-EtherCAT-EN/2024-10
Local PDF download
PDF1.2 MB
Part Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records1Tracked historical listing records
Historical median price$2,402.25Based on archived listing records
Recorded price range$2,402.25 - $2,402.25Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $2,402.25 to $2,402.25. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks GF120X-110948 Mass Flow Controller MFC AMAT 0190-91650 Lot of 4 New
Archived listings
Other Part Numbers & Aliases
GF120X-110948Brooks GF120X-110948Brooks Instrument GF120X-110948