GF120XSD is a Brooks Instrument GF120 Safe Delivery System metal-sealed thermal mass flow controller identifier in the GF100/GF120/GF125 family. Official Brooks GF100 data-sheet material lists GF120XSD directly and places it in the greater-than-25 sccm to 1 slm nitrogen-equivalent full-scale flow range. Sonisys auction history shows observed GF120XSD configurations for SiCl4, PH3, and H2O service in 30, 50, 150, and 200 sccm listings; those are stored auction contexts, not universal model-wide settings
Unit-specific configuration
Observed configuration
Historical listing records identify this part as 200 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Low vapor pressure gas applications require inlet pressure above 100 Torr with vacuum on the outlet
Materials
Wetted path standard
SEMI F20 HP compliant wetted materials
Wetted materials
316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero-leak-by valve configurations
Integrity
External leak integrity
1 x 10^-10 atm cc/sec helium
Environmental
Operating temperature
10 C to 50 C
Controls
Communication interfaces
Analog/RS-485, DeviceNet, or EtherCAT depending on configuration
Configuration
Configured-unit rule
Gas, range, communication interface, valve state, fitting package, and process options vary by configured model code and should be verified from the physical unit label
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records12Tracked historical listing records
Historical median price$249.99Based on archived listing records
Recorded price range$79.99 - $2,403.25Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $113.96 to $2,199.73. Based on 12 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
MFC BROOKS INSTRUMENTS GF SERIES THERMAL MASS FLOW 150 SCCM GF120XSD SiCL4
Brooks Instrument GF120XSD MFC Mass Flow Controller 50 SCCM PH3
Brooks Instrument GF120XSD Mass Flow Controller MFC SiCl4 200SCCM 0.2SLM
Brooks Instrument GF120XSD Mass Flow Controller MFC SiCl4 150SCCM .15SLM
Brooks Instrument GF120XSD Mass Flow Controller MFC SiCl4 200SCCM .20SLM
Brooks Instrument GFPROTO-543514 Mass Flow Controller MFC GF120XSD New Surplus
