Industrial parts, understood.
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Specifications, documents, photos, and historical listings for Brooks-family industrial parts.
1,597 part records. One place to start your research.
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Know what it does, but not the part number? Explore the main equipment families.
Flow Control
Mass flow controllers, meters, and gas delivery.
912 parts
Wafer Robotics
Wafer-handling robots, drives, and positioning.
198 parts
Load Ports
Carrier interfaces and wafer loading.
34 parts
Boards and Controllers
Circuit boards, I/O, and automation controls.
171 parts
RFID Readers
Readers and carrier identification.
20 parts
Sensors and Gauges
Pressure, position, and process measurement.
36 partsMore than a part number.
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Explore these part records to see the information available.
GF125C
Brooks Instrument GF125C GF125 Series Metal-Sealed Thermal Mass Flow Controller
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5850E
Brooks Instrument 5850E 5800E Series Elastomer-Sealed Analog Mass Flow Controller
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ATR60LF
Brooks Automation ATR60LF CAN Bus RFID Reader
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SLA7950S
Brooks Instrument SLA7950S SLA7900 Series Metal-Sealed Mass Flow Controller
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Part configurations can vary. Check the unit label and current manufacturer requirements before purchasing, replacing, or servicing equipment.
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