Brooks Instrument GF100 Series Metal-Sealed Thermal Mass Flow Controller
About this part
GF100CXXC is a configured Brooks Instrument GF100 Series metal-sealed thermal mass flow controller or meter identifier used in semiconductor, MOCVD, thin-film, and high-purity gas delivery. Official Brooks GF100 documentation covers the GF100/GF101/GF120/GF125/GF126 family and gives the series-level performance, materials, communication, and MultiFlo context; it does not publish a one-off specification for the complete suffix code GF100CXXC. Stored Sonisys auction records show many configured gas/range variants including N2 10 SCCM, N2 5000 SCCM, N2 7200 SCCM, N2 15000 SCCM, O2 30000 SCCM, HBr 50 SCCM, and other unit-specific ranges, so each physical unit should be verified from its label and full model code
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2 at 10 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Configured GF100 Series metal-sealed thermal mass flow controller or meter
Series family
Brooks GF100 / GF101 / GF120 / GF125 / GF126 metal-sealed thermal mass flow controllers and meters
Configured part number
GF100CXXC
Configuration
Configured-unit rule
Gas, full-scale range, communication interface, valve state, fitting package, surface finish, pressure-transient option, and customer/OEM suffix details vary by configured model code
Applications
Application domain
Semiconductor, MOCVD, thin-film, and high-purity gas flow control applications requiring a high-purity all-metal flow path
Performance
Flow accuracy
GF100 EtherCAT data sheet lists GF100 flow accuracy as 1% of set point over 20-100% and 0.2% full scale over 2-20%; Analog/DeviceNet documentation gives family accuracy context that remains configuration dependent
Repeatability and reproducibility
GF100 EtherCAT data sheet lists 5-100% repeatability/reproducibility as 0.15% of set point and 2-5% as 0.015% full scale
Flow settling time
GF100 EtherCAT data sheet lists normally closed GF100 settling time as less than 1 second; GF125 bins are documented separately from 300 ms to less than 700 ms
Pressure transient insensitivity
GF100-family documentation identifies pressure transient insensitivity as an available feature to reduce upstream-pressure crosstalk sensitivity; availability depends on configuration
Flow
GF100 full-scale flow context
GF100 EtherCAT data sheet lists GF100 full-scale flow range as 3 sccm to 55 slm; actual configured range must be read from the unit label
Gas/range programmability
MultiFlo gas and range technology enables supported GF100-family devices to support many gas and range combinations without removing the device from the gas line
Controls
Communication interfaces
Brooks documentation provides Analog/RS485, DeviceNet, RS485 L-Protocol, and EtherCAT documentation for GF100-family devices; actual interface depends on model code
Electrical
Analog connector context
GF100 installation manual documents Analog/RS485 configurations using a 9-pin D connector with 0-5 VDC output and setpoint pins plus RS485 DX+ and DX- pins
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records71Tracked historical listing records
Historical median price$654.55Based on archived listing records
Recorded price range$99.00 - $2,500.00Low to high recorded listing price
Local documents7PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $198.00 to $1,367.10. Based on 71 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks Instrument GF100CXXC He 3000 SCCM Mass Flow Controller
