GF120C-104837 is a configured Brooks Instrument GF120CXXC metal-sealed thermal mass flow controller associated with AMAT / Applied Materials part number 0190-48218-03. Stored auction and current listing evidence identify the observed configuration as N2 with an 860 SCCM maximum flow rate and surface-mount fitting context. The underlying GF120 family belongs to the Brooks GF100/GF120/GF125 high-purity thermal mass flow controller platform, so final gas, range, fitting, communication protocol, valve state, and calibration details should be verified from the physical unit label and calibration paperwork
Unit-specific configuration
Observed configuration
Historical listing records identify N2 at 860 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Metal-sealed thermal mass flow controller
Series family
GF120 within the Brooks GF100 / GF120 / GF125 Series
Configured Brooks model
GF120CXXC configured as GF120C-104837
Observed OEM part number
AMAT / Applied Materials 0190-48218-03
GF120 role
Safe Delivery System low-pressure-drop package for sub-atmospheric SDS gases used in implant and etch processes
Configuration
Configured-unit rule
Gas, full-scale range, communication interface, valve state, fitting package, and process options vary by configured model code and calibration
Applications
Application domain
Semiconductor, MOCVD, thin-film, and high-purity gas flow control
Performance
Flow accuracy
+/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration for the GF100/GF120/GF125 family
Repeatability and reproducibility
5-100% equals +/-0.15% of set point; 2-5% equals +/-0.015% of full scale
Settling time
Normally closed GF100/GF125 valve response ranges from 300 ms to less than 700 ms across documented flow bins; GF120 SDS response is configuration dependent
Control range
2-100% for normally closed valve configurations and 3-100% for normally open valve configurations where applicable
Ratings
Operating temperature
10 to 50 C series-level operating temperature range
GF120 maximum operating pressure
100 psia maximum for GF120
GF120 proof / design / burst pressure
140 psia proof pressure, 170 psia design pressure, and 500 psia burst pressure for GF120
External leak integrity
1 x 10^-10 atm cc/sec He
Materials
Wetted path standard
SEMI F20 HP compliant wetted materials
Wetted materials
316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional Zero Leak-by valve configurations
GF120 surface finish
5 microinch Ra
Controls
Communication interfaces
Analog/RS-485, DeviceNet, or EtherCAT depending on configuration
Analog connector
RS-485 / analog via 9-pin D connector on applicable analog configurations
DeviceNet connector
DeviceNet via 5-pin M12 connector on applicable DeviceNet configurations
Diagnostic/service port
RS-485 diagnostic port via 2.5 mm jack
Flow
Gas/range programmability
MultiFlo gas and range programmability is supported on applicable configurations
Observed configuration
N2 860 SCCM with surface-mount fitting context appears in current and stored listing evidence for GF120C-104837 / 0190-48218-03
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records14Tracked historical listing records
Historical median price$1,211.24Based on archived listing records
Recorded price range$179.10 - $1,211.24Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $1,211.24 to $1,211.24. Based on 14 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks Instrument GF120C-104837 Mass Flow Controller MFC AMAT 0190-48218 New
Brooks Instruments GF120C-104837 mass flow controller N2 860SCCM
