GF120C-104383 is a configured Brooks Instrument GF120CXXC metal-sealed thermal mass flow controller in the GF100/GF120/GF125 high-purity thermal mass flow controller platform. Stored auction evidence and exact listing evidence identify the observed configuration as 20 SCCM H2 with DeviceNet communication and surface-mount fitting context. The exact calibration, valve state, communication package, and process options should still be verified from the physical unit label and calibration paperwork
Unit-specific configuration
Observed configuration
Historical listing records identify this part as H2 at 20 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Metal-sealed thermal mass flow controller
Series family
GF120 within the Brooks GF100 / GF120 / GF125 Series
Configured Brooks model
GF120C-104383, observed in listing evidence as a GF120CXXC configured unit
Observed manufacturer part number
E23000948 in exact listing evidence
GF120 role
Safe Delivery System low-pressure-drop package for sub-atmospheric SDS gases used in implant and etch processes
Configuration
Configured-unit rule
Gas, full-scale range, communication interface, valve state, fitting package, and process options vary by configured model code and calibration
Applications
Application domain
Semiconductor, MOCVD, thin-film, and high-purity gas flow control
Performance
GF120 SDS full-scale range
4 sccm to 1 slm for GF120 SDS models in the official installation manual
Flow accuracy
+/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration for the GF100/GF120/GF125 family
Repeatability and reproducibility
5-100% equals +/-0.15% of set point; 2-5% equals +/-0.015% of full scale
Settling time
Sub-1 second settling is listed for GF100 Series devices; response for a specific GF120 configured unit depends on the valve, gas, range, and pressure conditions
Control range
2-100% for normally closed valve configurations and 3-100% for normally open valve configurations where applicable
Ratings
Operating temperature
10 to 50 C series-level operating temperature range
GF120 maximum operating pressure
100 psia maximum for GF120 in the official analog/DeviceNet data sheet
GF120 proof / design / burst pressure
140 psia proof pressure, 170 psia design pressure, and 500 psia burst pressure for GF120
External leak integrity
1 x 10^-10 atm cc/sec He
Materials
Wetted path standard
SEMI F20 HP compliant wetted materials
Wetted materials
316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional Zero Leak-by valve configurations
GF120 surface finish
5 microinch Ra
Controls
Communication interfaces
Analog/RS-485, DeviceNet, or EtherCAT depending on configuration
Observed interface
DeviceNet in exact listing evidence
DeviceNet connector
DeviceNet via 5-pin M12 connector on applicable DeviceNet configurations
Diagnostic/service port
RS-485 diagnostic/service port is listed for GF100/GF120/GF125 models
Flow
Gas/range programmability
MultiFlo gas and range programmability is supported on applicable GF100/GF120/GF125 configurations
Observed configuration
20 SCCM H2 with surface-mount fitting context appears in stored auction and exact listing evidence for GF120C-104383
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records4Tracked historical listing records
Historical median price$2,204.25Based on archived listing records
Recorded price range$1,204.25 - $2,604.25Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $1,384.25 to $2,604.25. Based on 4 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks Instrument GF120C-104383 Mass Flow Controller MFC Reseller Lot of 5 New
Brooks Instrument GF120C-104383 Mass Flow Controller MFC Reseller Lot of 2 New
Brooks Instrument GF120C-104383 Mass Flow Controller MFC 20 SCCM H2 New Surplus
