GF120C-104661 is a configured Brooks Instrument GF120CXXC metal-sealed thermal mass flow controller identifier observed in the Sonisys auction archive. Brooks GF100-series documentation covers GF100, GF101, GF120, GF120XSD, GF120XSL, GF121, GF125, and GF126 gas devices, with high-purity all-metal flow paths for semiconductor, MOCVD, and other gas-flow-control applications. The exact gas, full-scale range, protocol, fitting package, valve state, and calibration must be read from the configured unit label
Unit-specific configuration
Observed configuration
Historical listing records identify this part as Ar at 1000 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Metal-sealed thermal mass flow controller or meter
Series family
Brooks GF100 Series, including GF100, GF101, GF120, GF120XSD, GF120XSL, GF121, GF125, and GF126 gas models
Observed configured model
Stored auction titles identify the unit as GF120CXXC with Brooks configured identifier GF120C-104661
Applications
Application domain
Semiconductor, MOCVD, thin-film, and high-purity gas flow control
Flow
Flow technology
Thermal mass flow controller / meter for gases with high-purity all-metal flow path
Observed archived gas/range variants
Stored listings include Ar 1000 SCCM, SiH4 400 SCCM, He 600 SCCM, O2 400 SCCM, and NF3 400 SCCM examples for this configured identifier
Gas/range programmability
MultiFlo gas and range programmability is supported on applicable configurations
Performance
Accuracy
Series-level accuracy is configuration dependent; Brooks GF100 analog/DeviceNet documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration
Settling time
Normally closed valve response ranges from 300 ms to less than 700 ms over listed GF100/GF125 flow bins
Pressure transient insensitivity
GF100-series documentation lists pressure-transient-insensitivity features for consistent mass-flow delivery and reduced wafer-to-wafer variability on applicable configurations
Materials
Wetted path standard
SEMI F20 HP compliant wetted materials
Sensor material
Brooks GF100-series documentation identifies a corrosion-resistant Hastelloy sensor for long-term stability
Controls
Communication interfaces
Analog/RS-485, DeviceNet, or EtherCAT depending on configuration
Service
Diagnostic/service access
GF100-series documentation describes an independent diagnostic/service port for troubleshooting or changing flow conditions without removing the device from service
Configuration
Configured-unit rule
Gas, full-scale range, communication interface, valve state, fitting package, pressure options, and process options vary by configured model code and calibration label
