GF120CXXC is a configured Brooks Instrument GF120 Series metal-sealed thermal mass flow controller used in high-purity semiconductor gas delivery. The official GF100 Series data sheet groups GF100, GF120, and GF125 devices together, with GF120 positioned for Safe Delivery System low-pressure-drop service and a 5 microinch Ra surface finish. The exact gas, range, communication protocol, fitting, valve state, and customer option package must be read from the unit label
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Metal-sealed thermal mass flow controller
Series family
GF120 within the Brooks GF100 / GF120 / GF125 Series
GF120 role
GF120 Safe Delivery System package for low-pressure-drop delivery of sub-atmospheric SDS gases used in implant and etch processes
Configuration
Configured-unit rule
Gas, full-scale range, communication interface, valve state, fitting package, and process options vary by configured model code
Applications
Application domain
Semiconductor, MOCVD, thin-film, and high-purity gas flow control
Performance
Flow accuracy
Series-level accuracy is configuration dependent; the Brooks GF100/GF125 analog and DeviceNet data sheet lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration
Settling time
Normally closed valve response ranges from 300 ms to less than 700 ms over listed GF100/GF125 flow bins
Control range
2-100% for normally closed valve configurations and 3-100% for normally open valve configurations
Ratings
Operating temperature
10 to 50 C series-level operating temperature range
GF120 maximum operating pressure
100 psia maximum for GF120 in the official analog/DeviceNet data sheet
GF120 proof / design / burst pressure
140 psia proof pressure, 170 psia design pressure, and 500 psia burst pressure for GF120
External leak integrity
1 x 10^-10 atm cc/sec He
Materials
Wetted path standard
SEMI F20 HP compliant wetted materials
Wetted materials
316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional Zero Leak-by valve configurations
GF120 surface finish
5 microinch Ra
Controls
Communication interfaces
Analog/RS-485, DeviceNet, or EtherCAT depending on configuration
Analog connector
RS-485 / analog via 9-pin D connector on applicable analog configurations
DeviceNet connector
DeviceNet via 5-pin M12 connector on applicable DeviceNet configurations
Diagnostic/service port
RS-485 diagnostic port via 2.5 mm jack is listed for all models in the analog/DeviceNet data sheet
Flow
Gas/range programmability
MultiFlo gas and range programmability is supported on applicable configurations
MultiFlo status
MultiFlo is listed as standard for GF100/GF120/GF125 analog and DeviceNet configurations
Observed variants
Stored auction gas/range combinations
N2 (5), N2 10 SCCM (5), H2 1000 SCCM (2), AR 3000 SCCM (2), HE 600 SCCM (2), NF3 5000 SCCM (2), O2 30000 SCCM (2), AR 5 SCCM (1)
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records41Tracked historical listing records
Historical median price$285.00Based on archived listing records
Recorded price range$71.00 - $2,402.25Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $139.00 to $1,671.26. Based on 41 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks Instrument Thermal Mass Flow Controller New with Cert GF120CXXC N2 50SCCM
Brooks GF120CXXC Mass Flow Controller MFC GF120C Reseller Lot of 14 Working
Brooks Instrument GF120CXXC Mass Flow Controller MFC GF120 Reseller Lot of 10
