Brooks GF120XSL N2 10 SCCM SDS Mass Flow Controller
About this part
GF120X-909480 is a Brooks Instrument GF120XSL metal-sealed thermal mass flow controller configuration repeatedly observed in Sonisys auction records as an N2 / nitrogen 10 SCCM unit. Brooks official GF100 Series documentation identifies GF120XSL as a GF120 Safe Delivery System option for 4 to 25 sccm N2 equivalent full-scale flow, with the X configurability position meaning a specific gas/range configuration rather than a MultiFlo-capable bin configuration. This page combines that family documentation with the stored auction archive, while treating gas, range, valve, interface, fitting, label revision, and OEM/customer code details as unit-specific unless verified from the physical label
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2 at 10 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF120X-909480
Observed configured model
GF120XSL
Device type
Metal-sealed thermal mass flow controller for gas service
Series family
Brooks GF100 / GF120 / GF125 high-purity thermal mass flow controller family
Configuration
GF120 package meaning
GF120 indicates a 3 sccm to 55 slpm N2 equivalent GF package with 700 ms response and 5 microinch Ra surface-finish family option
X configurability meaning
X indicates not MultiFlo capable; a specific gas/range configuration is required for SDS, SL, SD, or HA special-application options
SL special-application meaning
SL is the GF120 Safe Delivery System option for 4 to 25 sccm N2 equivalent full-scale flow
Observed configuration
Stored auction gas
N2 / nitrogen
Stored auction full-scale flow
10 SCCM
Observed secondary code
330000527 appears in one stored title with GF120XSL and GF120X-909480
Performance
Flow accuracy
GF100/GF120/GF125 family data lists plus/minus 1% of set point above 35 to 100% and plus/minus 0.35% full scale over 2 to 35%, based on factory N2 calibration
Repeatability and reproducibility
GF100/GF120/GF125 family data lists plus/minus 0.15% of set point from 5 to 100% and plus/minus 0.015% full scale from 2 to 5%
GF120 response
GF120 package family data lists 700 ms response
GF120XSL / GF120XSD response
Safe Delivery System GF120XSL/GF120XSD family data lists less than 3 seconds settling time
Pressure
GF120XSL / GF120XSD differential pressure
Safe Delivery System family data lists 10 Torr to 30 psid typical differential pressure; consult factory for more detail
GF120XSL / GF120XSD maximum operating pressure
Safe Delivery System family data lists 100 psia maximum operating pressure
Mechanical
Wetted materials
SEMI F20 HP compliant wetted materials including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional Zero Leak-by Valve
Surface finish
GF120/GF125/GF120XSL/GF120XSD family data lists 5 microinch Ra
Controls
Electrical interfaces
GF100/GF120/GF125 family options include RS-485/analog via 9-pin D connector and DeviceNet via 5-pin M12 connector; the exact interface for GF120X-909480 must be read from the physical unit
Diagnostic port
Family documentation lists an RS-485 diagnostic/service port via 2.5 mm jack
Power
Power supply
Family documentation lists DeviceNet power at +11 to 25 Vdc or 24 Vdc, and RS-485/analog power at plus/minus 15 Vdc or +24 Vdc depending on configuration
Applications
Application domain
Semiconductor, MOCVD, thin-film, high-purity gas delivery, implant, and etch process gas control
Compatibility
Configured-unit rule
Gas, range, connector, fitting, valve option, communication interface, calibration reference, label revision, and OEM/customer code details must be verified from the physical unit label
