Sonisys Industrial Part Archive

Flow Control

GF120XSL

Brooks GF-Series Mass Flow Controller

About this part

GF120XSL is a Brooks Instrument GF120 Safe Delivery System metal-sealed thermal mass flow controller identifier in the GF100/GF120/GF125 family. Official Brooks GF100 data-sheet material lists GF120XSL directly and places it in the 4 to 25 sccm nitrogen-equivalent full-scale flow range. Sonisys auction history shows observed GF120XSL configurations for N2, BF3, and PH3 service, including 3, 5, and 10 sccm listing contexts; those are stored auction contexts, not universal model-wide settings

Unit-specific configuration
Observed configuration

Historical listing records identify this part as N2 at 10 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

SpecificationsDocuments (3)Photos (9)Listing history
Brooks GF120XSL GF100 / GF120 / GF125 Series auction imageArchived part photo ยท View gallery

Key Facts

ManufacturerBrooks Instrument
Part numberGF120XSL
Product familyGF100 Series
Device typeMass Flow Controller
Observed gasN2
Observed full-scale range10 SCCM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Device typeMetal-sealed thermal mass flow controller
Series familyBrooks GF100 / GF120 / GF125 Series
GF120XSL family roleGF120 Safe Delivery System configuration within the GF-series data-sheet family
Flow
GF120XSL full-scale range4 to 25 sccm nitrogen equivalent
GF120 SDS gas coverageGF120 Safe Delivery System documentation lists AsH3, PH3, BF3, SiF4, Ar, Xe, N2O, and N2 contexts, with other gases requiring factory consultation
Gas/range programmabilityMultiFlo gas and range programmability is supported on applicable configurations
Applications
Application domainSemiconductor, MOCVD, thin-film, and high-purity gas flow control
Performance
Flow accuracy+/-1% of set point from 35-100% and +/-0.35% full scale from 2-35%, based on factory N2 calibration
Repeatability and reproducibility+/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Settling timeGF120XSL normally closed valve settling time is listed as less than 3 seconds
Control range2-100% for normally closed valve configurations
Pressure
GF120XSL maximum operating pressure100 psia maximum
GF120XSL proof/design/burst pressure140 psia proof pressure, 170 psia design pressure, and 500 psia burst pressure
Materials
Wetted path standardSEMI F20 HP compliant wetted materials
Wetted materials316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero-leak-by valve configurations
Integrity
External leak integrity1 x 10^-10 atm cc/sec helium
Environmental
Operating temperature10 C to 50 C
Controls
Communication interfacesAnalog/RS-485, DeviceNet, or EtherCAT depending on configuration
Configuration
Configured-unit ruleGas, range, communication interface, valve state, fitting package, and process options vary by configured model code and should be verified from the physical unit label
Observed variants
Stored auction gas/range combinationsN2 10 SCCM (6), 3 SCCM (2), 5 SCCM (1), MASS 10 SCCM (1), N2 5 SCCM (1)

Documentation Downloads

Local PDF copies
Brooks GF100 Series Analog and DeviceNet Data Sheet Local PDF download
PDF4.2 MB
 Brooks GF100 Series Installation and Operation Manual Local PDF download
PDF6.1 MB
 Brooks MultiFlo Configurator Quick Start Guide Local PDF download
PDF3.2 MB

Part Photos

9 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records14Tracked historical listing records
Historical median price$343.00Based on archived listing records
Recorded price range$57.00 - $2,500.00Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $81.00 to $2,101.01. Based on 14 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks Instrument GF120XSL Thermal Mass Flow Controller (N2/10sccm)
  • Brooks GF120XSL Mass Flow Controller (BF3 / 3sccm)
  • 1pcs BROOKS GF120XSL 10SCCM BF3 gas mass flowmeter/xjk
  • Brooks Instrument GF120XSL Thermal Mass Flow Controller GAS; PH3

Archived listings

Other Part Numbers & Aliases

GF120XSLBrooks GF120XSLBrooks Instrument GF120XSLGF120XSL MFCGF120X-909480GF120X-907326GF120X-104042330000527