Flow Control
GF120X-110554
Brooks Instrument GF120-Series Metal-Sealed Thermal Mass Flow Controller
About this part
GF120X-110554 is a configured Brooks Instrument GF120-series high-purity digital thermal mass flow controller identifier. In Brooks ordering documentation, the GF120X prefix denotes a fixed-gas/range special-application build rather than a MultiFlo-capable configuration. An observed unit is associated with Applied Materials 0190-91650 and described for surface-mount N2 service, but its stated 2000 sccm range, EtherNet/IP interface, and model suffix conflict with current Brooks GF120XSD documentation. The complete Brooks model code, physical label, build record, or calibration certificate is required before using those attributes for replacement selection
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Exact configured identifier | GF120X-110554 |
| Documented platform | GF100 Series, GF120 model line |
| Measurement technology | Digital thermal mass-flow measurement and control for gases |
| X configurability code | Not MultiFlo capable; a specific gas and range are required, and the Brooks standard-flow ordering table requires an SD, SL, or HA special-application option |
| Family flow-path context | Current GF100 Series documentation describes a metal-sealed, all-metal high-purity/ultra-high-purity flow path with SEMI F20 HP-compliant wetted materials. Exact installed materials and options remain configuration dependent |
| Documented family interfaces | Brooks documents analog/RS-485, DeviceNet, and EtherCAT configurations for the GF100 Series. The connector portion of the complete model code is required to establish the installed interface; EtherNet/IP is not identified for GF120XSD in the current cited Brooks documents |
| GF120 SDS range context | Current Brooks documentation lists 4-25 sccm N2-equivalent for GF120XSL and greater than 25 sccm through 1 slpm N2-equivalent for GF120XSD. These limits apply only when the complete code confirms the corresponding SDS option |
| GF120 SDS settling-time context | Current Brooks documentation lists less than 3 seconds for GF120XSL and GF120XSD normally closed configurations; do not assert this value unless the complete model code confirms an SDS build |
What Does GF120X-110554 Mean?
The public Brooks ordering structure supports decoding only the GF120X prefix. The numeric configured-part suffix is not defined in the published ordering tables.
| Segment | Field | Interpretation |
|---|---|---|
| GF | Base model | Brooks high-purity/ultra-high-purity digital mass flow controller. |
| 120 | Package/model line | GF120 standard-flow platform. Special-application codes can change the applicable flow-range and response context. |
| X | Configurability | Not MultiFlo capable; a specific gas and range are required. Brooks requires this value to be paired with an SD, SL, or HA special-application code. |
| 110554 | Configured-part suffix | Not decoded by the public Brooks ordering tables; it does not independently establish gas, range, fitting, valve, connector, calibration, or footprint. |
Configuration Verification Boundaries
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,204.25 to $1,204.25. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument GF120X-110554 Mass Flow Controller MFC 2000 SCCM N2 New Spare