Flow Control
GF120X-109501
Brooks Instrument GF120 Metal-Sealed Thermal Mass Flow Controller
About this part
GF120X-109501 identifies a configured Brooks Instrument GF120-platform metal-sealed thermal mass flow controller. GF120 denotes the high-performance, non-PTI platform, while X denotes disabled MultiFlo configurability. Gas, full-scale range, specialty application, valve, fitting, and communication interface remain configured-unit details requiring the unit label or Brooks build record
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Product family | GF120 model line within the Brooks GF100 Series |
| Performance platform | GF120 is the high-performance, non-pressure-transient-insensitive platform |
| Measuring principle | Thermal mass flow measurement for gases |
| Configurability code | X denotes disabled configurability; this configuration is not MultiFlo capable and requires a specific gas/range |
| Family communication options | RS-485/analog, DeviceNet, and EtherCAT are documented family options; GF120X-109501 does not identify the installed connector or interface |
| GF120 family flow envelope | 3 sccm to 55 slpm nitrogen-equivalent; this does not establish the configured full-scale range of GF120X-109501 |
| GF120 response context | The manufacturer product-code table lists 700 ms for the GF120 package; actual applicability depends on valve and configured-unit details |
| Family accuracy context | Applicable analog and DeviceNet documentation lists ±1% of set point from 35-100% full scale and ±0.35% full scale from 2-35%, based on factory nitrogen calibration; this is not a calibration claim for GF120X-109501 |
| Family repeatability context | Applicable family documentation lists ±0.15% of set point from 5-100% and ±0.015% full scale from 2-5% |
| Wetted-path context | GF100 Series documentation describes an all-metal, corrosion-resistant, SEMI F20-compliant high-purity wetted flow path; exact wetted components remain configuration dependent |
| Family application domain | Semiconductor, MOCVD, implant, etch, thin-film, and other high-purity gas-flow applications |
What Does GF120X-109501 Mean?
Only segments defined by the Brooks product-description-code documentation are decoded.
| Segment | Field | Interpretation |
|---|---|---|
| GF | Base model code | High-purity and ultra-high-purity digital mass flow controller family |
| 120 | Performance model | High-performance, non-PTI GF120 platform |
| X | Configurability | Configurability disabled; not MultiFlo capable |
| -109501 | Unpublished identifier suffix | Not represented in the published product-description-code structure; its configuration meaning requires a Brooks build record or physical label |
Specialty-Application Boundary
GF120 supports several specialty-application codes, but the abbreviated GF120X-109501 identifier does not expose that field.
| Published option | Manufacturer meaning | Applicability to GF120X-109501 |
|---|---|---|
| XX | Standard application | Not established |
| SL | Safe Delivery System; 4-25 sccm nitrogen-equivalent family range | A 20 sccm observation falls within this family envelope but does not prove the SL option |
| SD | Safe Delivery System; above 25 sccm through 1 slpm nitrogen-equivalent family range | Not established |
| HT | High-temperature configuration, up to 150°C | Not established |
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $299.00 to $299.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument PH3 20sccm GF120X-109501 GF Series Thermal Mass Flow Controlle