Flow Control
GF120X-107123
Brooks Instrument Metal-Sealed Thermal Mass Flow Controller
About this part
Brooks Instrument GF120X-107123 identifies a configured GF120-family metal-sealed thermal mass flow controller. The GF100 Series is designed for high-purity and ultra-high-purity gas-flow service, including semiconductor and MOCVD applications. Exact gas, calibrated full-scale range, special application, valve, fitting, connector, and communications require the unit label, complete product-description code, build record, or calibration certificate
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Device type | Configured metal-sealed thermal mass flow controller |
| Series context | GF100 Series; the identifier carries the GF120 package prefix |
| Family application domain | Semiconductor, MOCVD, implant, etch, thin-film, and other high-purity gas-flow applications |
| Standard family flow-range context | The current analog/DeviceNet data sheet lists a 3 sccm to 55 slpm N2-equivalent envelope for standard GF100, GF120, and GF125 configurations; this is not the established full-scale range of GF120X-107123 |
| Family accuracy context | For applicable GF100/GF120/GF125 analog and DeviceNet configurations, ±1% of set point from 35-100% full scale and ±0.35% full scale from 2-35%, based on factory N2 calibration |
| Family repeatability context | For applicable configurations, ±0.15% of set point from 5-100% and ±0.015% full scale from 2-5% |
| GF120 settling-time context | The current family table lists 700 ms for a standard GF120 normally closed valve and less than 3 seconds for GF120 SDS configurations; the special application and valve fitted to GF120X-107123 are not established |
| Family wetted-path context | SEMI F20 HP-compliant materials and an all-metal high-purity flow path are documented for the GF100 Series; exact wetted components vary by configuration |
| Family communications context | Analog/RS-485, DeviceNet, and EtherCAT configurations are documented; the installed interface cannot be determined from GF120X-107123 alone |
What Does GF120X-107123 Mean?
The current Brooks product-description-code tables decode the GF120X prefix but not the hyphenated six-digit suffix. Because the supplied identifier is shorter than a complete order code, it does not establish the special application or remaining configured options.
| Segment | Field | Interpretation |
|---|---|---|
| GF | Base model | High-purity/ultra-high-purity digital mass flow controller family. |
| 120 | Package / finish | Current GF120 code context: 3 sccm to 55 slpm N2-equivalent standard-range envelope, 700 ms response, and 5 µin Ra finish. These code definitions do not establish the exact calibration or special application of this unit. |
| X | Configurability | The current table defines X as not MultiFlo-capable, requiring a specific gas/range and an SD, SL, or HA special-application selection in the complete product code. |
| - | Identifier separator | Separates the GF120X prefix from the configured numeric identifier; no public Brooks decoding rule was located for this abbreviated format. |
| 107123 | Configured suffix | Not decoded by the public product-description-code tables. A label, build record, or calibration certificate is required to resolve it. |
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,202.25 to $1,202.25. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument GF120X-107123 Mass Flow Controller MFC 3 SCCM CH40 New Spare