Brooks Instrument GF120XSL Metal-Sealed Thermal Mass Flow Controller
About this part
GF120X-102024 identifies a configured Brooks Instrument GF120 thermal mass flow controller. The observed unit is designated GF120XSL and labeled for PH3 service at 3 sccm. GF120XSL is Brooks’ low-flow Safe Delivery System variant for subatmospheric gas delivery in implant and etch applications. The published model code defines X configurations as non-MultiFlo units requiring a specific gas and range. GF120X-102024 does not disclose the fitting, electrical interface, or remaining configured options; those details require the complete model code or unit label
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Manufacturer
Brooks Instrument
Product family
GF120 model line within the Brooks GF100 Series
Device type
Metal-sealed high-purity/ultra-high-purity thermal mass flow controller for gases
Configuration
Configurability code
The X segment denotes a non-MultiFlo configuration requiring a specific gas and range and an applicable SL, SD, or HA special-application code
Flow
GF120XSL full-scale range
4-25 sccm N2-equivalent model-class range; an observed GF120X-102024 unit is labeled 3 sccm PH3, which is a service-gas value rather than an N2-equivalent range
Performance
GF120XSL flow accuracy
±1% of set point from 35-100% full scale and ±0.35% full scale from 2-35%, based on factory N2 calibration
GF120XSL repeatability and reproducibility
±0.15% of set point from 5-100% and ±0.015% full scale from 2-5%
GF120XSL settling time
Less than 3 seconds with the normally closed valve
GF120XSL control range
2-100% full scale with the normally closed valve
Ratings
Operating temperature
10-50 °C for the documented GF120XSL model class
Maximum operating pressure
500 psia maximum for the documented GF120XSL model class
Mechanical
Valve type
Normally closed for GF120XSL Safe Delivery System configurations
Surface finish
5 µin Ra for the documented GF120XSL model class
External leak integrity
1 × 10^-10 atm·cc/sec helium for the documented GF120XSL model class
Materials
Wetted path
SEMI F20 HP-compliant; documented family materials include 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and configuration-dependent PCTFE
Controls
Installed communication interface
Not established by GF120X-102024. Brooks documents analog/RS-485, DeviceNet, and EtherCAT family configurations; the complete model code or connector must identify the installed interface
What Does GF120X-102024 Mean?
Brooks’ published model-code table supports decoding the GF120X prefix but does not define the six-digit suffix as an ordering-code field.
Segment
Field
Interpretation
GF
Base model
High-purity/ultra-high-purity digital mass flow controller platform.
120
Package and finish
GF120 package. The standard model-code table identifies a 5 µin Ra flow path; special-application performance depends on the accompanying application code.
X
Configurability
Not MultiFlo capable. A specific gas and range are required, together with an SL, SD, or HA special-application code.
SL
Observed model’s special application
Safe Delivery System low-flow configuration, documented for 4-25 sccm N2-equivalent full-scale ranges. SL is supplied by the observed model designation GF120XSL; it is not present in GF120X-102024 itself.
102024
Configured-unit suffix
Not defined by the published GF100 Series model-code table. It must not be decoded as a gas, range, fitting, valve, or communication option.
Flow-Range Interpretation
The observed 3 sccm PH3 marking and Brooks’ 4-25 sccm N2-equivalent GF120XSL range are not directly conflicting values. Brooks expresses the model-class envelope in N2-equivalent flow, while the listing describes the configured full-scale flow for PH3. The calibration record or complete model code is required to establish the conversion and calibration basis.
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records1Tracked historical listing records
Historical median price$1,202.25Based on archived listing records
Recorded price range$1,202.25 - $1,202.25Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $1,202.25 to $1,202.25. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks Instrument GF120X-102024 Mass Flow Controller MFC 3 SCCM PH3 New Spare
