Brooks Instrument GF120XSL Safe Delivery System Mass Flow Controller
About this part
GF120X-101995 is a configured Brooks Instrument GF120XSL Safe Delivery System thermal mass flow controller identifier. The GF120XSL platform is the low-flow, normally closed, non-MultiFlo member of the GF120 SDS line, intended for subatmospheric gas delivery in semiconductor implant and etch processes. Exact-item records agree on a 5 sccm range but conflict on the configured gas, identifying either N2 or PH3; the calibration gas, fitting, connector, communications interface, and customer options therefore require confirmation from the physical label or Brooks build record
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Model association
GF120XSL Safe Delivery System configuration; the remaining full order-code options are unresolved
Device type
Metal-sealed, low-pressure-drop thermal mass flow controller for gases
Applications
Intended service
Subatmospheric Safe Delivery System gas delivery in semiconductor implant and etch processes
Flow
GF120XSL full-scale range envelope
4-25 sccm N2 equivalent; the exact configured identifier is observed at 5 sccm
Control range
2-100% of full scale with the normally closed valve, as specified for GF120XSL
Configuration
Gas and range configurability
The X configurability code is not MultiFlo capable and requires a specific factory gas and range
Valve
Valve configuration
Normally closed; Brooks requires the normally closed valve code with the SL Safe Delivery System option
Performance
Settling time
Less than 3 seconds for the GF120XSL model
Valve shutdown
Less than 1% of full scale with the standard Hastelloy normally closed valve for GF120XSL
Zero stability
Less than ±0.6% of full scale per year for the GF120XSL model
Ratings
Operating temperature
10-50 °C for the documented GF120XSL platform
Differential pressure
10 Torr to 30 psid typical for the documented Safe Delivery System models; Brooks directs users to consult the factory for application details
Materials
Wetted path
SEMI F20 HP-compliant metal-sealed flow path; the family table lists 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, and KM-45, with PCTFE only on the optional zero-leak-by valve
Mechanical
Surface finish context
The GF120 package code is specified at 5 µin Ra
Model-code interpretation
Only the GF120XSL model portion can be decoded reliably without the complete Brooks order code.
Code element
Manufacturer meaning
Applicability
GF120
High-performance GF120 package with 5 µin Ra surface-finish context
GF120 platform
X
Not MultiFlo capable; a specific gas and range are required
Applies to the identified X-coded configuration
SL
Safe Delivery System special application with a 4-25 sccm N2-equivalent full-scale envelope
Applies to the GF120XSL association
C
Normally closed valve; required with the SL option
Model-code requirement, although the complete configured code is unavailable
V downstream option
Vacuum outlet is the default for SL configurations
Model default; the installed fitting and downstream option still require label confirmation
Configuration conflict
The available exact-item records support the same 5 sccm range but do not establish one authoritative process gas.
Consistent observation5 sccm range
Archived recordN2 gas medium
Current recordPH3 gas service
Required resolutionPhysical label, calibration certificate, or Brooks configured-unit build record
