Flow Control

UG80-00067241

Brooks SLA5850D1EDD1A2A1 Mass Flow Controller —

About this part

UG80-00067241 identifies an archived Brooks Instrument SLA5800-series mass flow controller bearing configured model code SLA5850D1EDD1A2A1. The Brooks code specifies DeviceNet communication, 1/4-inch VCR connections, Kalrez O-rings and valve seat, a normally closed valve, 24 Vdc power, standard response, and safe-area certification. Gas identity and full-scale flow are calibration-specific unit attributes rather than values encoded by this model code

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Documents (4)Photos (0)Listing history

No archived photo available

Key Facts

ManufacturerBrooks Instrument SLA5800 Series

Part numberUG80-00067241

Product familySLA5800 Series

Device typeMass Flow Controller

Configuration statusConfiguration varies

Application classSemiconductor/high-purity gas delivery

CategoryFlow Control

Specifications

Identification

Record identifier	UG80-00067241
Manufacturer	Brooks Instrument
Configured model code	SLA5850D1EDD1A2A1
Product series	SLA5800 standard elastomer series
Function	Gas mass flow controller

Configured Model Code

Body size	Size 0; Brooks ordering range 3 ccm to 50 lpm
Digital communication	DeviceNet I/O
Network connector	5-pin micro connector
Process connection	1/4-inch VCR
O-ring material	Kalrez
Valve-seat material	Kalrez
Valve type	Normally closed
Analog I/O	None; digital communication only
Power option	24 Vdc
Response option	Standard response
Certification option	Safe area

Electrical

DeviceNet supply range

+11 to +25 Vdc

What Does UG80-00067241 Mean?

UG80-00067241 is not decoded in Brooks literature. The associated complete Brooks ordering code is SLA5850D1EDD1A2A1.

Segment	Field	Interpretation
UG80-00067241	Record identifier	Secondary/archive identifier associated with the configured controller; no official Brooks meaning established
SLA	Base model	Brooks SLA platform
58	Package / finish	Standard elastomer series
5	Function	Mass flow controller
0	Body size	Size 0; ordering range 3 ccm to 50 lpm
D	Digital I/O	DeviceNet I/O with 5-pin micro connector
1E	Mechanical connection	1/4-inch VCR
D	O-ring material	Kalrez
D	Valve seat	Kalrez
1	Valve type	Normally closed
A	Analog I/O	None; digital communication only
2	Power supply	24 Vdc option
A	Output enhancement	Standard response
1	Certification	Safe area

Calibration and Replacement Boundary

The ordering code establishes the mechanical, electrical, sealing, valve, and certification options listed above, but it does not encode the selected gas page, calibrated full-scale flow, calibration conditions, serial number, or hardware revision. Replacement selection should match the unit label and calibration record in addition to the complete model code.