Flow Control
SLA5800
Brooks Series Digital Thermal Mass Flow Controllers and Meters
About this part
SLA5800 is the Brooks Instrument elastomer-sealed digital thermal mass flow controller and mass flow meter family covering SLA5850, SLA5851, SLA5853 controller models and SLA5860, SLA5861, SLA5863 meter models. The series is used for advanced gas handling and general process gas measurement or control, with exact gas, range, valve package, process connection, seal material, and communication protocol determined by the configured model code and unit label
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part numberSLA5800
Product familySLA5800 Series
Device typeThermal Mass Flow Device
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Device type | Elastomer-sealed digital thermal mass flow controller or meter for gases |
| Controller models | SLA5850, SLA5851, and SLA5853 |
| Meter models | SLA5860, SLA5861, and SLA5863 |
Configuration
| Configured-unit rule | Gas, full-scale range, process connections, seals, valve state, and digital communications vary by configured code |
Applications
| Application domain | Advanced gas handling, production, laboratory, analytical, chemical and petrochemical research, fuel cell, life science, and process gas control |
Flow
| Overall full-scale range | Less than 3 ccm to 2500 lpm N2 equivalent across the SLA5800 family |
| SLA5850 / SLA5860 range | 0-3 ccm to 0-30 lpm N2 equivalent; up to 0-50 lpm with coplanar valve option |
| SLA5851 / SLA5861 range | 20-100 lpm N2 equivalent, with H2 flows up to 200 lpm possible |
| SLA5853 / SLA5863 range | 100-2500 lpm N2 equivalent |
Performance
| Accuracy | +/-1.0% of rate from 20-100% full scale and +/-0.2% full scale below 20% full scale up to 1100 lpm; +/-1.0% full scale above 1100 lpm through 2500 lpm |
| Optional accuracy | Optional S-Series accuracy is +/-0.7% of rate plus +/-0.2% full scale up to 1100 lpm |
| Repeatability | +/-0.20% of rate |
| Control range | 50:1 turndown; 100:1 turndown with coplanar valve option for 1-50 lpm N2 equivalent full-scale ranges |
| Settling time | Less than 1 second to within +/-2% full scale for a 0-100% command step up to 100 lpm; less than 3 seconds for greater than 100 lpm through 2500 lpm |
| Long-term drift | Less than 0.2% per year |
| Mounting attitude sensitivity | Less than 0.2% full-scale maximum deviation from specified accuracy after rezeroing |
Calibration
| Selectable calibration curves | Storage of up to 10 selectable calibration curves |
| Zeroing | SLA-Series zeroing can be performed with the zero button or Brooks Service Suite software after thermal stabilization and no-flow confirmation |
Controls
| Analog interface | 15-pin D-connector with 0(1)-5 V or 0(4)-20 mA setpoint and flow signals |
| Digital communication options | RS-485 / HART-based S-protocol, DeviceNet, FOUNDATION Fieldbus, Profibus, EtherNet/IP, and EtherCAT options depending on configuration and revision |
| Power supply | Analog option 13.5-27 Vdc; digital options vary by protocol, including DeviceNet 11-25 Vdc and FOUNDATION Fieldbus 14-27 Vdc |
| Valve features | Valve override, soft start, adaptive valve control, and coplanar valve options are available depending on configuration |
Ratings
| Pressure ratings by model family | SLA5850/SLA5860 and SLA5851/SLA5861 are listed at 100 bar / 1500 psi; SLA5853/SLA5863 are listed at 70 bar / 1000 psi; optional 300 bar / 4500 psi versions exist for 50, 60, and 61 series bodies |
| Operating ambient temperature | 0 to 65 C |
| Non-operating ambient temperature | -25 to 100 C |
| Fluid temperature | 0 to 65 C |
| Leak integrity | 1 x 10^-9 atm scc/sec helium maximum, inboard to outboard |
Materials
| Wetted materials | Stainless steel wetted parts with Viton fluoroelastomers standard; optional Buna-N, Kalrez, Teflon/Kalrez, and EPDM seal materials |
Connections
| Process connection context | Flow-through, flange, coplanar valve, and elastomer downport connection configurations are available depending on model and configured code |
Approvals
| Certification context | EMC, UL Recognized, ATEX, hazardous-location, and Pressure Equipment Directive contexts are documented for applicable configurations |
Observed variants
| Stored auction gas/range combinations | N2 150 SLM (5), AIR (3), N2 (3), O2 250 SCCM (1), 1500 SCCM (1), N2 500 SLM (1), 100 SCCM (1), H2 (1), H2 300 SCCM (1), Argon 2100 SLPM (1), N2 500 SCCM (1) |
Documentation Downloads
Local PDF copiesPart Photos
27 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records40Tracked historical listing records
Historical median price$261.76Based on archived listing records
Recorded price range$77.17 - $5,054.66Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $107.60 to $504.88. Based on 40 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks SLA5800 Series SLA5850EMF51ADNCGA Thermal Mass Flow Controller
- Brooks SLA5800 Thermal Mass Flow Controller
- BROOKS INSTRUMENT SLA5800 sla 5851S1GAB1C2A1 thermal mass flow GAS:N2 NO RESERVE
- Brooks SLA5800 1/4" Tube Fitting 750SMLM Thermal Mass Flow Meter G17
- Brooks Instrument Thermal Mass Flow Controller SLA5800
- Brooks Instrument SLA5800 Thermal Mass Flow Controller, Meter, H2, 13.5-27VDC
Archived listings
Other Part Numbers & Aliases
SLA5800Brooks SLA5800Brooks Instrument SLA5800SLA5800 SeriesBrooks SLA5800 SeriesSLA5851SLA5853SLA5860SLA5861SLA5863SLA5850DSLA5850SSLA5850FSLA5860SSLA5850S1CAB1B2S1SLA5850S1BCF1C2A1SLA5850EMF51ADNCGASLA5851S1GAB1C2A1SLA5860S1BJA032A1SLA5853S/BE2BA3BA0BA1B2SLA5850S1BAB1B2A1SLA5850S1CAB1L2A1