Brooks Instrument SLA5850 Digital Thermal Mass Flow Controller
About this part
SLA5850S1CAB1L2A1 is a configured Brooks Instrument SLA5850 / SLA5800 Series elastomer-sealed digital thermal mass flow controller identifier. Stored auction evidence and exact eBay product-page evidence confirm the part number as a Brooks mass-flow device, but the local auction titles do not provide a reliable gas or full-scale range. Brooks SLA5800 documentation covers SLA5850, SLA5851, and SLA5853 controllers plus related SLA5860-series meters; gas, range, process connection, seal package, valve state, and communication option remain configured-unit details that should be verified from the unit label
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Elastomer-sealed digital thermal mass flow controller for gases
Series family
SLA5800 Series
Related documented controller models
SLA5850, SLA5851, and SLA5853
Observed part identity
Stored auction titles identify SLA5850S1CAB1L2A1 as a Brooks Instrument SLA5800 Series thermal mass flow controller; exact eBay product data lists Brooks as brand and SLA5850S1CAB1L2A1 as MPN
Configuration
Configured-unit rule
Gas, full-scale range, process connections, seal material, valve state, electrical interface, and digital communications vary by configured code
Applications
Application domain
Advanced gas handling, production, laboratory, analytical, chemical and petrochemical research, fuel cell, life science, and process gas control
Flow
SLA5850 range capability
0-3 ccm to 0-30 lpm N2 equivalent; up to 0-50 lpm with coplanar valve option
Overall SLA5800 family range
Less than 3 ccm to 2500 lpm N2 equivalent across the SLA5800 family
Observed gas/range status
No verified gas or full-scale range is currently available in stored Sonisys titles for this configured code
Performance
Accuracy
+/-1.0% of rate from 20-100% full scale and +/-0.2% full scale below 20% full scale up to 1100 lpm
Repeatability
+/-0.20% of rate
Control range
50:1 turndown; 100:1 turndown with coplanar valve option for 1-50 lpm N2 equivalent full-scale ranges
Settling time
Less than 1 second to within +/-2% full scale for a 0-100% command step up to 100 lpm
Long-term drift
Less than 0.2% per year
Calibration
Selectable calibration curves
Storage of up to 10 selectable calibration curves
Controls
Analog interface
15-pin D-connector with 0(1)-5 V or 0(4)-20 mA setpoint and flow signals, depending on configuration
Digital communication options
RS-485 / HART-based S-protocol, DeviceNet, FOUNDATION Fieldbus, Profibus, EtherNet/IP, and EtherCAT options depending on configuration and revision
Gas/range programmability
MultiFlo gas and range programmability is supported on applicable SLA5800 configurations
Electrical
Power supply context
Analog option 13.5-27 Vdc; digital options vary by protocol
Ratings
Pressure rating context
SLA5850/SLA5860 model family is listed at 100 bar / 1500 psi; optional higher-pressure versions exist for selected body styles
Operating ambient temperature
0 to 65 C
Non-operating ambient temperature
-25 to 100 C
Leak integrity
1 x 10^-9 atm scc/sec helium maximum, inboard to outboard
Materials
Wetted materials
Stainless steel wetted parts with Viton fluoroelastomers standard; optional Buna-N, Kalrez, Teflon/Kalrez, and EPDM seal materials
Connections
Process connection context
Flow-through, flange, coplanar valve, and elastomer downport connection configurations are available depending on model and configured code
