Brooks Instrument SLA5800 Digital Thermal Mass Flow Controller
About this part
SLA5850S is a Brooks Instrument SLA5800 Series elastomer-sealed digital thermal mass flow controller model. Brooks documentation identifies the SLA5850S as an analog I/O mass flow controller with RS-485 and elastomer downport connections. Sonisys auction history includes exact configured-code observations such as SLA5850S1BAB6BA1A with N2 wording and SLA5850S1BDD6B1A1 with mixture 2 SLPM wording, but gas, range, seals, valve, connection, and communication details remain configured-unit properties
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Elastomer-sealed digital thermal mass flow controller for gases
Series family
SLA5800 Series
Documented model identity
Model SLA5850S analog I/O MFC with RS-485 and elastomer downport connections
Related documented controller models
SLA5850, SLA5851, and SLA5853
Configuration
Configured-unit rule
Gas, full-scale range, process connections, seal material, valve state, electrical interface, and digital communications vary by configured code
Applications
Application domain
Advanced gas handling, production, laboratory, analytical, chemical and petrochemical research, fuel cell, life science, and process gas control
Flow
SLA5850 range capability
0-3 ccm to 0-30 lpm N2 equivalent; up to 0-50 lpm with coplanar valve option
Overall SLA5800 family range
Less than 3 ccm to 2500 lpm N2 equivalent across the SLA5800 family
Observed Listing Context
Observed N2 configured code
Stored and listing evidence includes SLA5850S1BAB6BA1A with N2 wording
Observed mixture configured code
Stored and listing evidence includes SLA5850S1BDD6B1A1 Rev A with mixture 2 SLPM wording
Performance
Accuracy
+/-1.0% of rate from 20-100% full scale and +/-0.2% full scale below 20% full scale up to 1100 lpm
Repeatability
+/-0.20% of rate
Control range
50:1 turndown; 100:1 turndown with coplanar valve option for 1-50 lpm N2 equivalent full-scale ranges
Settling time
Less than 1 second to within +/-2% full scale for a 0-100% command step up to 100 lpm
Long-term drift
Less than 0.2% per year
Calibration
Selectable calibration curves
Storage of up to 10 selectable calibration curves
Controls
Analog interface
15-pin D-connector with 0(1)-5 V or 0(4)-20 mA setpoint and flow signals, depending on configuration
SLA5850S digital context
SLA5850S is documented as analog I/O with RS-485; other SLA5800 variants support DeviceNet, FOUNDATION Fieldbus, Profibus, EtherNet/IP, and EtherCAT options
Electrical
Power supply context
Analog option 13.5-27 Vdc; digital options vary by protocol
Ratings
Pressure rating context
SLA5850/SLA5860 model family is listed at 100 bar / 1500 psi; optional higher-pressure versions exist for selected body styles
Operating ambient temperature
0 to 65 C
Leak integrity
1 x 10^-9 atm scc/sec helium maximum, inboard to outboard
Materials
Wetted materials
Stainless steel wetted parts with Viton fluoroelastomers standard; optional Buna-N, Kalrez, Teflon/Kalrez, and EPDM seal materials
Connections
Connection context
SLA5850S uses elastomer downport connections; specific process interface and seal package depend on the configured code
Documents
Hosted official documentation
Sonisys hosts local copies of Brooks SLA5800 data sheet, installation manual, quick start guide, and MultiFlo configurator guide
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records8Tracked historical listing records
Historical median price$717.60Based on archived listing records
Recorded price range$250.00 - $2,257.48Low to high recorded listing price
Local documents4PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $355.00 to $2,054.81. Based on 8 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
LowTariff✓ BROOKS MFC SLA5850S
LowTariff BROOKS MFC SLA5850S
SLA5850S New Flowmeter SLA5850S Brooks Instrument SLA5850S
SLA5850S New Flowmeter SLA5850S Brooks Instrument SLA5850S Fast transportation
BROOKS SLA5850S DELTA II MASS FLOW N2 SLA5850S1BAB6BA1A N2
BROOKS SLA5850S DELTA II MASS FLOW MIXTURE 2 SLPM SLA5850S1BDD6B1A1 Rev A
Archived listings
Other Part Numbers & Aliases
SLA5850SBrooks SLA5850SBrooks Instrument SLA5850SBrooks SLA5850S MFCBrooks SLA5850S Mass Flow ControllerSLA5850S Mass Flow ControllerSLA5850S FlowmeterSLA5850S1BAB6BA1ABrooks SLA5850S1BAB6BA1ASLA5850S1BDD6B1A1Brooks SLA5850S1BDD6B1A1