Brooks Instrument GF126 Thermal Mass Flow Controller
About this part
GF126X-105961 is a configured Brooks Instrument GF126-family thermal mass flow controller identifier observed in Sonisys auction records and exact listing evidence. Official Brooks GF100 Series documentation covers the GF101/GF121/GF126 high-flow family and identifies GF126 as a 55 to 300 slm N2-equivalent high-flow package with 5 Ra UHP wetted flow path and integrated pressure measurement, but no verified official one-part specification for GF126X-105961 is currently available. The exact gas, full-scale flow range, fitting, downstream condition, sensor orientation, communication connector, customer-special details, auto-shutoff setting, auto-zero setting, and reference temperature must be verified from the physical unit label or Brooks configuration record
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF126X-105961
Device type
Configured GF126 high-flow metal-sealed thermal mass flow controller; exact controller-versus-meter and valve details must be verified from the full unit label
Series family
Brooks GF100 Series high-purity and ultra-high-purity thermal mass flow controllers and meters, including GF101, GF121, and GF126 high-flow models
Observed exact listing context
Exact listing evidence identifies GF126X-105961 as a Brooks thermal mass flow controller; no reliable gas or full-scale flow range was stated
Configuration
GF126 package context
Brooks GF101/GF121/GF126 product-code documentation lists GF126 as a 55 to 300 slm N2-equivalent package with 5 Ra UHP wetted flow path and integrated pressure measurement
X configurability context
In Brooks GF101/GF121/GF126 product-code documentation, X in the configurability position means not configurable; the exact configured gas/range and the meaning of the -105961 suffix require the complete unit label or Brooks configuration record
Configured-unit rule
Gas, full-scale flow range, fitting package, downstream condition, sensor orientation, connector, customer special request, auto shut-off, auto zero, and reference temperature are configuration-specific and must not be inferred from auction title wording
Applications
Application domain
Semiconductor, MOCVD, thin-film, purge, and other high-purity gas flow control applications requiring an all-metal flow path
Flow
GF126 full-scale flow context
Brooks GF101/GF121/GF126 specifications list a 55 slm to 300 slm N2-equivalent family range; the exact configured range for GF126X-105961 was not verified
Performance
Flow accuracy context
Brooks GF101/GF121/GF126 specifications list +/-1% of set point from 35-100% and +/-0.35% full scale from 2-35%, based on factory N2 calibration; applicability depends on the configured unit
Repeatability and reproducibility
Brooks GF101/GF121/GF126 specifications list repeatability and reproducibility as less than +/-0.15% of set point
Response time
Brooks GF101/GF121/GF126 specifications list normally closed valve response time as less than 1 second; verify valve configuration for this exact unit
Ratings
Operating temperature range
Brooks GF101/GF121/GF126 specifications list 10 C to 50 C operating temperature range
Pressure ratings
Brooks GF101/GF121/GF126 specifications list maximum operating pressure as 75 psig for controller configurations and 150 psig for meter configurations
Materials
Wetted path standard
Brooks GF101/GF121/GF126 specifications list SEMI F20 HP compliant wetted-material context
Wetted material context
Brooks GF101/GF121/GF126 documentation lists 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, and KM-45 wetted material context
Controls
Communication interfaces
Brooks GF100-family documentation covers Analog/RS485, DeviceNet, and EtherCAT communication options; the actual connector and protocol require the full configured model code
Display and diagnostics
Diagnostics
Official GF101/GF121/GF126 specifications list status lights, alarms, top-mount integrated LCD context, and an RS485 diagnostic/service port depending on configuration
