Brooks GF125 Series Metal-Sealed Thermal Mass Flow Controller
About this part
GF125XSL-100122 is a configured Brooks Instrument GF125-series metal-sealed thermal mass flow controller identifier in the GF100/GF120/GF125 family. Official Brooks GF100-family documentation supports GF125 family specifications such as high-purity all-metal gas flow control, MultiFlo gas/range capability, pressure-transient-insensitive GF125 behavior, and analog/RS-485 or DeviceNet configuration options; EtherCAT is covered by the separate GF100 EtherCAT product family. The exact gas, full-scale range, protocol, fitting, valve state, and surface-finish details for GF125XSL-100122 should be verified from the physical unit label. Sonisys stored auction records observe 750 SCCM and normally closed context for this configured identifier, which is listing context rather than an official model-wide configuration
Unit-specific configuration
Observed configuration
Historical listing records identify this part as 750 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Metal-sealed thermal mass flow controller
Series family
Brooks GF100 / GF120 / GF125 Series
GF125 family role
GF125 is the pressure-transient-insensitive member of the GF100/GF120/GF125 family
Configuration
Configured-unit rule
Gas, full-scale range, communication interface, valve state, fitting package, body style, surface-finish option, and process options vary by configured model code and should be verified from the physical unit label
Applications
Application domain
Semiconductor, MOCVD, thin-film, and high-purity or ultra-high-purity gas flow control
Flow
Standard GF full-scale range
Official GF100/GF120/GF125 analog and DeviceNet documentation lists 3 sccm to 55 slm nitrogen equivalent for standard GF100/GF120/GF125 configurations
Gas/range programmability
MultiFlo gas and range technology is supported on applicable GF100/GF120/GF125 configurations
MultiFlo bin count
Official GF100/GF120/GF125 documentation lists 11 MultiFlo bins
Performance
Flow accuracy
+/-1% of set point from 35-100% and +/-0.35% full scale from 2-35%, based on factory N2 calibration
Repeatability and reproducibility
+/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Settling time
Normally closed valve settling time is listed as 300 ms for 3-860 sccm, 400 ms for 861-7200 sccm, 500 ms for 7201-30000 sccm, and less than 700 ms for 30001-55000 sccm
Pressure transient insensitivity
GF125 pressure-transient-insensitive behavior is listed as less than 5% of set point variation up to a 5 psi/sec upstream pressure spike
