Brooks Instrument GF125 Series Metal-Sealed Mass Flow Controller
About this part
GF125CXXC-SH47015L-VXVOG1 is a configured Brooks Instrument GF125-series high-purity metal-sealed thermal mass flow controller identifier observed in Sonisys auction records. Official Brooks GF100/GF120/GF125 product-description-code documentation supports the decoded configuration as a GF125 pressure-transient-insensitive, MultiFlo-capable, standard-application, normally closed controller with SH47 015L standard bin, VX 1/4 in VCR male fitting, vacuum outlet condition, default sensor orientation, and G1 9-pin D RS485 connector. No verified official exact-part PDF or build sheet naming the full identifier is currently available, so gas compatibility, CSR/options, calibration details, and installed suitability should still be confirmed from the physical unit label or Brooks build record
Unit-specific configuration
Observed configuration
Historical listing records identify this part as 15000 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF125CXXC-SH47015L-VXVOG1
Device type
Configured Brooks Instrument GF125 high-purity metal-sealed thermal mass flow controller; the C valve-code segment indicates a controller with normally closed valve rather than a meter-only build
Series documentation family
Brooks documentation groups GF100, GF101, GF120, GF120XSD, GF120XSL, GF121, GF125, and GF126 under the GF100 metal-sealed mass flow controller and meter documentation set
Configuration
Decoded model code
GF125CXXC-SH47015L-VXVOG1 decodes as GF125 package, C MultiFlo capable, XX standard special-application code, C normally closed valve, SH47 015L standard bin, VX fitting, V outlet-to-vacuum condition, O default sensor orientation, and G1 connector
Configured-unit rule
Gas, CSR/customer options, calibration record, installed pressure limits, and process compatibility remain configuration-specific and should be confirmed from the full unit label or Brooks build record
Applications
Application domain
Brooks GF100/GF120/GF125 family documentation positions these devices for semiconductor, MOCVD, thin-film, and other high-purity gas flow-control applications requiring an all-metal flow path
Performance
GF125 package context
Brooks model-code documentation identifies GF125 as the pressure-transient-insensitive package with 3 sccm to 55 slpm N2-equivalent flow-range context, +/-1.0% of set point accuracy context, 300 ms to 700 ms response context, and 5 microinch Ra surface-finish context
SH47 015L bin
The official Brooks product-description-code table defines SH47 015L as Standard Configuration #47, 7201 to 15000 sccm nitrogen-equivalent at 0 degrees C reference
Flow accuracy
Official GF100/GF120/GF125 family documentation lists accuracy as +/-1% of set point over the upper controlled range and +/-0.35% full scale over the lower controlled range, based on factory N2 calibration; exact installed performance remains gas- and configuration-dependent
Pressure transient behavior
Brooks documentation describes GF125 as the PTI variant intended to reduce the effect of pressure fluctuations in gas flow; verify applicability to the installed process and gas from the unit record
Mechanical
Fitting code
VX in the official Brooks GF100/GF120/GF125 product-description-code table indicates 1-1/2 in body width, 124 mm, 1/4 in VCR male fitting
Downstream and sensor codes
V indicates outlet to vacuum, and O indicates the default sensor orientation in the Brooks product-description-code table
Controls
Connector/interface code
G1 in the official Brooks GF100/GF120/GF125 analog and DeviceNet product-description-code table indicates 9-pin D with RS485
Materials
Wetted path standard
Official GF100/GF120/GF125 family documentation describes SEMI F20 HP-compliant wetted materials for the family
Flow
Gas/range programmability
The C configurability segment indicates MultiFlo capability, and Brooks MultiFlo documentation supports gas and range programming for applicable GF1XX devices; do not infer a specific process gas from the abbreviated part number alone
Observed configuration
Stored auction gas/range combinations
Stored exact-part auction evidence reports SH47 15000 SCCM wording on 2 tracked listing records; use this as observed listing context only, not as a substitute for the physical label or Brooks build record
Live listing observation
A live marketplace listing for the exact identifier shows Brooks brand,, SH47 15000 SCCM title context, and item images; this evidence is used only for identity, observed configuration, image, and price context
