Flow Control

GF125C-203621

Brooks Instrument GF125 Series Metal-Sealed Mass Flow Controller

About this part

GF125C-203621 is a configured Brooks Instrument GF125/GF100-family metal-sealed thermal mass flow controller for semiconductor, MOCVD, thin-film, and high-purity gas delivery. Official Brooks GF100/GF120/GF125 documentation covers the platform, performance context, wetted-materials context, communication families, MultiFlo support, and installation guidance, but no verified official one-part specification for GF125C-203621 is currently available Stored Sonisys auction evidence associates this exact configured identifier with GF125CXXC wording and SiH4 100 SCCM listing context; verify gas, full-scale range, valve state, fitting package, communication option, and any customer or OEM marking from the physical unit label before reuse

Configurations vary. Verify the exact unit before choosing a replacement.

No archived photo available

Key Facts

ManufacturerBrooks Instrument
Part numberGF125C-203621
Product familyGF100 Series
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Part identifierGF125C-203621
Device typeMetal-sealed thermal mass flow controller
Series familyBrooks GF100 / GF120 / GF125 metal-sealed mass flow controller and meter family
Observed model contextGF125CXXC appears in stored exact auction evidence for this configured code; treat it as observed model wording, not as an exact alias
Applications
Application domainSemiconductor, MOCVD, thin-film, and high-purity process gas flow control applications requiring an all-metal flow path
Performance
Family accuracy contextBrooks GF100/GF120/GF125 documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration for applicable analog and DeviceNet configurations
Family repeatability contextBrooks GF100/GF120/GF125 documentation lists repeatability and reproducibility of +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Family settling-time contextBrooks GF100/GF120/GF125 documentation lists normally closed valve settling-time bins from 300 ms to less than 700 ms across documented flow bins, depending on configuration
Pressure transient insensitivityBrooks GF100/GF120/GF125 documentation identifies GF125 devices as pressure transient insensitive, with actual performance depending on the configured device and operating conditions
Materials
Wetted path standardBrooks GF100/GF120/GF125 documentation describes SEMI F20 HP compliant wetted materials
Wetted materials contextBrooks GF100/GF120/GF125 documentation lists wetted material context including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero leak-by valve configurations
Leak integrity
External leak integrityBrooks GF100/GF120/GF125 data-sheet table lists external leak integrity of 1 x 10^-10 atm cc/sec helium
Controls
Communication interfacesBrooks documentation provides Analog/RS-485, DeviceNet, RS485 L-Protocol, and EtherCAT context for the GF100 family; the actual interface depends on the configured electronics option
Flow
Gas/range programmabilityMultiFlo gas and range configurability is documented for supported GF100-family devices
Ratings
Operating temperature contextBrooks GF100/GF120/GF125 documentation lists a 10 C to 50 C operating temperature range for documented family configurations
Configuration
Configured-unit ruleGas, full-scale flow range, valve or meter configuration, fitting package, electrical connector, communication protocol, display, surface finish, seal package, and customer/OEM options vary by full configured model code
Observed configuration
Stored auction gas/range combinationsStored exact auction evidence reports SiH4 100 SCCM in two listings for GF125C-203621; use this as observed listing context and verify against the physical unit label
Stored listing observationsStored exact auction evidence identifies GF125C-203621 as a Brooks GF125CXXC mass flow controller with SiH4 100 SCCM listing context; use this only as observed identity and configuration context

Documentation Downloads

Local PDF copies

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$1,173.16Based on archived listing records
Recorded price range$1,143.07 - $1,203.24Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $1,149.09 to $1,197.22. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks GF125C-203621 Mass Flow Controller MFC GF125CXXC 100 SCCM SiH4 New Spare

Archived listings

Other Part Numbers & Aliases

GF125C-203621Brooks GF125C-203621Brooks Instrument GF125C-203621