Brooks Instrument GF125 Series Metal-Sealed Mass Flow Controller
About this part
GF125C-203467 is a configured Brooks Instrument GF125/GF100-family metal-sealed thermal mass flow controller for semiconductor, MOCVD, thin-film, and high-purity gas delivery. Official Brooks GF100/GF120/GF125 documentation covers the platform, performance context, wetted-materials context, communication families, MultiFlo support, and installation guidance, but no verified official one-part specification for GF125C-203467 is currently available Stored and live exact listing evidence associates this configured identifier with GF125CXXC wording, AMAT 0190-49896-03 listing context, and conflicting observed gas/range claims including N2 7200 SCCM and Ar 6000 SCCM; verify gas, full-scale range, valve state, fitting package, communication option, and any customer or OEM marking from the physical unit label before reuse
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF125C-203467
Device type
Metal-sealed thermal mass flow controller
Series family
Brooks GF100 / GF120 / GF125 metal-sealed mass flow controller and meter family
Observed model context
GF125CXXC appears in exact listing evidence for this configured code; treat it as observed model wording, not as an exact alias
Observed customer/OEM context
Exact listing evidence associates GF125C-203467 with AMAT Applied Materials part number 0190-49896-03; treat this as listing-context identity evidence until verified from a physical label or customer BOM
Applications
Application domain
Semiconductor, MOCVD, thin-film, and high-purity process gas flow control applications requiring an all-metal flow path
Performance
Family accuracy context
Brooks GF100/GF120/GF125 documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration for applicable analog and DeviceNet configurations
Family repeatability context
Brooks GF100/GF120/GF125 documentation lists repeatability and reproducibility of +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Family settling-time context
Brooks GF100/GF120/GF125 documentation lists normally closed valve settling-time bins from 300 ms to less than 700 ms across documented flow bins, depending on configuration
Pressure transient insensitivity
Brooks GF100/GF120/GF125 documentation identifies GF125 devices as pressure transient insensitive, with actual performance depending on the configured device and operating conditions
Materials
Wetted path standard
Brooks GF100/GF120/GF125 documentation describes SEMI F20 HP compliant wetted materials
Wetted materials context
Brooks GF100/GF120/GF125 documentation lists wetted material context including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero leak-by valve configurations
Leak integrity
External leak integrity
Brooks GF100/GF120/GF125 data-sheet table lists external leak integrity of 1 x 10^-10 atm cc/sec helium
Controls
Communication interfaces
Brooks documentation provides Analog/RS-485, DeviceNet, RS485 L-Protocol, and EtherCAT context for the GF100 family; the actual interface depends on the configured electronics option
Flow
Gas/range programmability
MultiFlo gas and range configurability is documented for supported GF100-family devices
Ratings
Operating temperature context
Brooks GF100/GF120/GF125 documentation lists a 10 C to 50 C operating temperature range for documented family configurations
Configuration
Configured-unit rule
Gas, full-scale flow range, valve or meter configuration, fitting package, electrical connector, communication protocol, display, surface finish, seal package, and customer/OEM options vary by full configured model code
Observed configuration
Stored auction gas/range combinations
Stored exact auction evidence reports N2 7200 SCCM in two listings for GF125C-203467; use this as observed listing context and verify against the physical unit label
Live exact listing gas/range context
One live exact listing for GF125C-203467 reports Ar and 6000 SCCM; this conflicts with the stored N2 7200 SCCM listing context and should not be treated as an official fixed configuration
Stored listing observations
Stored exact auction evidence identifies GF125C-203467 as a Brooks Instrument GF125CXXC mass flow controller with AMAT 0190-49896 and N2 7200 SCCM listing context; use this only as observed identity and configuration context
