Brooks Instrument GF125 Series Metal-Sealed Mass Flow Controller
About this part
GF125C-201042 is a configured Brooks Instrument GF125/GF100-family metal-sealed thermal mass flow controller for semiconductor, MOCVD, thin-film, and high-purity gas delivery. Official Brooks GF100/GF120/GF125 documentation covers the platform, performance context, materials, communication families, MultiFlo support, and installation guidance, but no verified official one-part specification for GF125C-201042 is currently available Stored auction evidence associates this exact configured identifier with AR 5000 SCCM and SH46 listing context; verify gas, full-scale range, valve state, fitting package, communication option, and any customer or OEM marking from the physical unit label before reuse
Unit-specific configuration
Observed configuration
Historical listing records identify this part as AR at 5000 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF125C-201042
Device type
Metal-sealed thermal mass flow controller
Series family
Brooks GF100 / GF120 / GF125 metal-sealed mass flow controller and meter family
Applications
Application domain
Semiconductor, MOCVD, thin-film, and high-purity process gas flow control applications requiring an all-metal flow path
Performance
Family accuracy context
Brooks GF100/GF120/GF125 documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration for applicable analog and DeviceNet configurations
Family repeatability context
Brooks GF100/GF120/GF125 documentation lists repeatability and reproducibility of +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Family settling-time context
Brooks GF100/GF120/GF125 documentation lists normally closed valve settling-time bins from 300 ms to less than 700 ms across documented flow bins, depending on configuration
Pressure transient insensitivity
Brooks documentation states that pressure transient insensitivity is included with GF125 models, and the GF125 package/finish code 125 is identified as pressure transient insensitive
Materials
Wetted path standard
Brooks GF100/GF120/GF125 documentation describes SEMI F20 HP compliant wetted materials
Wetted materials context
Brooks GF100/GF120/GF125 documentation lists wetted material context including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero leak-by valve configurations
Leak integrity
External leak integrity
Brooks GF100/GF120/GF125 data-sheet table lists external leak integrity of 1 x 10^-10 atm cc/sec helium
Controls
Communication interfaces
Brooks documentation provides Analog/RS-485, DeviceNet, RS485 L-Protocol, and EtherCAT context for the GF100 family; the actual interface depends on the configured electronics option
Flow
Gas/range programmability
MultiFlo gas and range configurability is documented for supported GF100-family devices
SH46 family bin context
Brooks model-code documentation identifies SH46 as standard configuration #46 with a 2601 to 7200 sccm N2-equivalent flow-bin context
Argon application context
Brooks GF100/GF120/GF125 documentation notes that argon gas applications require an additional 10 psid differential pressure; apply only if the physical unit label and process setup confirm argon service
Ratings
Operating temperature context
Brooks GF100/GF120/GF125 documentation lists a 10 C to 50 C operating temperature range for documented family configurations
Configuration
Configured-unit rule
Gas, full-scale flow range, valve or meter configuration, fitting package, electrical connector, communication protocol, display, surface finish, seal package, and customer/OEM options vary by full configured model code
Observed configuration
Stored auction gas/range combinations
Stored exact auction evidence reports AR 5000 SCCM for GF125C-201042; use this as observed listing context and verify against the physical unit label
Stored listing observations
Stored exact auction evidence identifies GF125C-201042 with AR 5000 SCCM and SH46 listing context; use this only as observed identity and configuration context
