Brooks GF125 Series Metal-Sealed Mass Flow Controller
About this part
GF125C-107267 is a configured Brooks Instrument GF125-family metal-sealed thermal mass flow controller identifier observed in Sonisys auction records and live exact-part listings. Official Brooks GF100-series documentation covers GF100/GF120/GF125 metal-sealed gas mass flow controllers and meters for semiconductor, MOCVD, thin-film, and high-purity gas delivery. The exact gas, full-scale range, protocol, fitting, valve, surface finish, and customer-request options must be verified from the physical unit label; stored auction evidence for this exact identifier shows 30000 SCCM units, with N2 stated on two stored listings
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2 at 30000 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF125C-107267
Device type
Brooks Instrument GF-series metal-sealed thermal mass flow controller or meter; exact controller-versus-meter and valve configuration must be verified from the unit label
Series documentation family
Brooks documentation lists GF100 / GF120 / GF125 models under the GF100 metal-sealed mass flow controller and meter documentation set
Observed model marking context
Live exact-part auction evidence identifies units as GF125CXXC mass flow controllers with GF125C-107267 markings; GF125CXXC is treated as observed configuration context, not as a separate exact alias for this record
Configuration
Configured-unit rule
Gas, full-scale range, communication interface, valve state, fitting package, surface finish, mounting attitude, and customer special request options vary by the configured model code and label
Applications
Application domain
Semiconductor, MOCVD, thin-film, and high-purity gas flow control applications requiring a high-purity all-metal flow path
Performance
Flow accuracy
Series-level GF100/GF120/GF125 analog and DeviceNet documentation lists flow accuracy as +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35%, based on factory N2 calibration; exact installed performance remains configuration dependent
Settling time
Series-level normally closed valve response is listed by flow bin, including 500 ms for 7201-30000 sccm and less than 700 ms for 30001-55000 sccm; confirm the applicable bin and valve option from the physical unit
Materials
Wetted path standard
Series-level documentation lists SEMI F20 HP compliant wetted materials, including 316L VIM/VAR stainless steel, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE where used on optional zero leak-by valves
Controls
Communication interfaces
GF100/GF120/GF125 family documentation covers analog/RS-485, DeviceNet, and EtherCAT variants; the interface for GF125C-107267 must be read from the configured unit
Flow
Gas/range programmability
Brooks MultiFlo configuration documentation supports GF1XX-series gas and range programming for applicable devices; use current Brooks software/databases and verify the selected gas, range, and bin against the connected unit
Observed variants
Stored auction gas/range combinations
Stored exact-part auction evidence shows N2 30000 SCCM on 2 tracked listings and 30000 SCCM with gas not stated on 1 tracked listing
