Brooks Instrument GF125 Series Metal-Sealed Mass Flow Controller
About this part
GF125C-104870 is a configured Brooks Instrument GF125/GF100-family metal-sealed thermal mass flow controller for semiconductor, MOCVD, thin-film, and high-purity gas delivery. Official Brooks GF100/GF120/GF125 documentation covers the platform, performance context, materials, communication families, MultiFlo support, and installation guidance, but no verified official one-part specification for GF125C-104870 is currently available Stored Sonisys auction history associates this exact configured identifier with Brooks Instrument mass flow controller listings that report 1000 SCCM WF6 context; verify gas, full-scale range, valve state, fitting package, communication option, and any customer or OEM marking from the physical unit label before reuse
Unit-specific configuration
Observed configuration
Historical listing records identify this part as WF6 at 1000 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF125C-104870
Device type
Metal-sealed thermal mass flow controller
Series family
Brooks GF100 / GF120 / GF125 metal-sealed mass flow controller and meter family
Applications
Application domain
Semiconductor, MOCVD, thin-film, and high-purity process gas flow control applications requiring an all-metal flow path
Performance
Family accuracy context
Brooks GF100/GF120/GF125 documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration for applicable analog and DeviceNet configurations
Family repeatability context
Brooks GF100/GF120/GF125 documentation lists repeatability and reproducibility of +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Family settling-time context
Brooks GF100/GF120/GF125 documentation lists normally closed valve settling-time bins from 300 ms to less than 700 ms across documented flow bins, depending on configuration
Pressure transient insensitivity
Brooks model-code documentation identifies GF125 package/finish code 125 as pressure transient insensitive with a 3 sccm to 55 slpm N2-equivalent flow-range context
Materials
Wetted path standard
Brooks GF100/GF120/GF125 documentation describes SEMI F20 HP compliant wetted materials
Wetted materials context
Brooks GF100/GF120/GF125 documentation lists wetted material context including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero leak-by valve configurations
Leak integrity
External leak integrity
Brooks GF100/GF120/GF125 data-sheet table lists external leak integrity of 1 x 10^-10 atm cc/sec helium
Controls
Communication interfaces
Brooks documentation provides Analog/RS-485, DeviceNet, RS485 L-Protocol, and EtherCAT context for the GF100 family; the actual interface depends on the configured electronics option
Flow
Gas/range programmability
MultiFlo gas and range configurability is documented for supported GF100-family devices
Ratings
Operating temperature context
Brooks GF100/GF120/GF125 documentation lists a 10 C to 50 C operating temperature range for documented family configurations
Configuration
Configured-unit rule
Gas, full-scale flow range, valve or meter configuration, fitting package, electrical connector, communication protocol, display, surface finish, seal package, and customer/OEM options vary by full configured model code
Observed configuration
Stored auction gas/range observations
Stored exact auction titles for this part report 1000 SCCM WF6 context across 3 tracked listing records; this is listing-observed context, not an official Brooks specification
Stored listing observations
Stored exact auction evidence identifies GF125C-104870 as a Brooks Instrument mass flow controller; use this only as observed identity context
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records3Tracked historical listing records
Historical median price$1,049.00Based on archived listing records
Recorded price range$862.00 - $1,209.24Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $899.40 to $1,177.19. Based on 3 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks GF125C-104870 Mass Flow Controller MFC GF125CXXC 1000 SCCM WF6 New Spare
Brooks GF125C-104870 Mass Flow Controller MFC GF125CXXC 1000 SCCM WF6
