Brooks Instrument GF125C Metal-Sealed Mass Flow Controller
About this part
GF125C-100041 is a configured Brooks Instrument GF125C / GF100-family metal-sealed thermal mass flow controller identifier used in high-purity semiconductor and process-gas delivery contexts. Official Brooks documentation supports GF100/GF120/GF125 family-level specifications, while exact gas, range, protocol, fitting, valve, and surface-finish details must be confirmed from the unit label or Brooks configuration record. Stored Sonisys auction evidence and exact-part marketplace/surplus evidence associate this configured identifier with GF125CXXC wording, N2 2600 SCCM context, and AMAT 0190-40280-02 context
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2 at 2600 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF125C-100041
Device type
Configured Brooks metal-sealed thermal mass flow controller
Series family
Brooks GF100 / GF120 / GF125 metal-sealed mass flow controller and meter family
Observed model context
GF125CXXC appears in exact listing evidence for this configured code; treat it as observed model wording, not as an exact alias
Observed AMAT context
AMAT 0190-40280-02 appears with GF125C-100041 in exact listing evidence; verify the marking on the physical unit label before procurement or installation
Configuration
Configured-unit rule
Gas, full-scale range, communication interface, valve state, fitting package, pressure-transient option, and process options vary by configured model code and should be confirmed from the physical label or OEM build documentation
Applications
Application domain
High-purity and ultra-high-purity gas flow control for semiconductor, MOCVD, thin-film, and related process-gas delivery systems
Performance
Flow accuracy
Official GF100/GF120/GF125 family documentation lists accuracy as +/-1% of set point from 35-100% full scale and +/-0.35% full scale from 2-35% full scale, based on factory N2 calibration; applicability to this configured unit depends on the actual build and calibration
Settling time
Official family documentation lists normally closed GF125 response bins from 300 ms for low-flow ranges through less than 700 ms for higher listed ranges; exact response depends on the configured gas, range, and valve option
Pressure transient insensitivity
Brooks model-code documentation identifies GF125 package/finish code 125 as pressure transient insensitive with a 3 sccm to 55 slpm N2-equivalent flow-range context
Materials
Wetted path standard
Official GF100/GF120/GF125 family documentation describes SEMI F20 HP-compliant wetted materials for the family
Wetted materials context
Official GF100/GF120/GF125 documentation lists wetted material context including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero leak-by valve configurations
Leak integrity
External leak integrity
Brooks GF100/GF120/GF125 data-sheet table lists external leak integrity of 1 x 10^-10 atm cc/sec helium
Controls
Communication interfaces
Official family documentation covers Analog/RS-485, DeviceNet, RS485 L-Protocol, and EtherCAT variants depending on configuration
Flow
Gas/range programmability
Brooks MultiFlo gas and range programmability is supported on applicable GF-series configurations; do not infer a specific enabled gas table from the configured part number alone
Observed variants
Stored auction gas/range combinations
Stored Sonisys title evidence includes N2 context, with one stored title listing N2 2600 SCCM for this exact configured identifier
Observed configuration
Additional exact-part observations
Listing evidence associates GF125C-100041 with GF125CXXC wording, AMAT 0190-40280-02, N2, and 2600 SCCM context; these values are observed listing evidence, not an official exact-part datasheet
