Sonisys Industrial Part Archive

Flow Control

GF125

Brooks Instrument Series Pressure Transient Insensitive Mass Flow Controller

About this part

GF125 is a Brooks Instrument pressure transient insensitive metal-sealed thermal mass flow controller series used for semiconductor, thin-film, MOCVD, etch, deposition, and other high-purity gas flow control applications. The archived Sonisys listings include GF125, GF125C, and GF125CXXC title contexts with observed gases and ranges such as N2 280 SCCM, Ar, O2, CO, and NH3-style listing shorthand. Exact gas calibration, range, fitting, interface, valve state, and customer-special suffix details vary by the full configured model code and unit label

Unit-specific configuration
Observed configuration

Historical listing records identify this part as N2 at 280 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

SpecificationsDocuments (4)Photos (5)Listing history
Brooks Instrument GF125 Series Mass Flow Controller auction imageArchived part photo ยท View gallery

Key Facts

ManufacturerBrooks Instrument
Part numberGF125
Product familyGF100 Series
Device typeMass Flow Controller
Observed gasN2
Observed full-scale range280 SCCM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Series identifierGF125
Device typePressure transient insensitive metal-sealed thermal mass flow controller or meter
Series familyBrooks GF100 / GF120 / GF125 high-purity and ultra-high-purity digital mass flow controller family
GF125 roleBrooks GF125 documentation describes the series as a pressure transient insensitive redesign of Brooks core PTI mass flow control technology
Applications
Application domainSemiconductor, thin-film, MOCVD, dielectric etch, polysilicon etch, metal etch, low-k deposition, plasma-enhanced deposition, ALD, high-density plasma deposition, and high-purity gas delivery
Performance
Pressure transient insensitivityGF125 PTI technology is documented as reducing the effect of upstream and downstream pressure fluctuations on gas flow
Documented PTI flow rangeThe GF125 product configuration sheet lists PTI flow ranges from 3 sccm to 30 slm N2 equivalent across SH40 through SH48 configurations
Standard configuration flow binsDocumented GF125 standard configuration bins include 3-10 sccm, 11-30 sccm, 31-92 sccm, 93-280 sccm, 281-860 sccm, 861-2600 sccm, 2601-7200 sccm, 7201-15000 sccm, and 15001-30000 sccm N2 equivalent
Typical setpoint responseGF125 documentation lists typical setpoint response of 300 milliseconds from command to desired flow output within the recommended operating range
Settling time by flow binGF125 documentation lists settling times of 300 msec for SH40-SH44, 400 msec for SH45-SH46, and 500 msec for SH47-SH48
Standard accuracyGF125 documentation lists standard accuracy as +/-0.35% full scale from 5-35% and +/-1.0% set point from 35-100%
Repeatability and reproducibilityGF125 documentation lists repeatability and reproducibility as +/-0.15% of set point
Zero stabilityGF125 documentation lists zero drift as less than 0.5% full scale per year
Materials
Wetted path standardGF125 documentation lists a surface-passivated SEMI F20 compliant wetted flow path
Flow path surface finishGF125 documentation lists 4 microinch Ra surface finish
Seal typeGF125 documentation lists metal seals
Pressure
External leak integrityGF125 documentation lists external leak integrity of 1 x 10^-11 atm cc/sec helium
Proof pressureGF125 documentation lists 140 psia maximum proof pressure
Controls
Gas/range programmabilityGF125 Multi-Gas/Multi-Range configurability supports gas and calibration-curve configuration; documented range scaling can change full-scale flow up to 3:1 where supported
Communication interfacesGF125 documentation lists DeviceNet via 5-pin M8 connector and Analog/RS-485 via 9-pin D connector, with GF100-family documentation also covering RS485 L-Protocol and EtherCAT contexts depending on configuration
Diagnostic/service portGF125 documentation lists an independent RS485 diagnostic port via 2.5 mm jack
Electrical
Power consumptionGF125 documentation lists 545 mA maximum at 11 VDC, 250 mA maximum at 24 VDC, and 6 W maximum at +/-15 VDC
Operating environment
Temperature rangeGF125 documentation lists 10 C to 50 C operating temperature range
Observed configuration
Observed auction configurationsSonisys listing titles include N2 280 SCCM, Ar 600 cc, O2 450/500 cc, CO 500 cc, and several GF125C/GF125CXXC family contexts

Documentation Downloads

Local PDF copies
Brooks GF125 Mass Flow Controllers Data Sheet Local PDF download
PDF805 KB
 Brooks GF100 Series Analog and DeviceNet Data Sheet Local PDF download
PDF4.2 MB
 Brooks GF100 Series Installation and Operation Manual Local PDF download
PDF6.1 MB
 Brooks MultiFlo Configurator Quick Start Guide Local PDF download
PDF3.2 MB

Part Photos

5 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records10Tracked historical listing records
Historical median price$199.99Based on archived listing records
Recorded price range$75.90 - $2,003.76Low to high recorded listing price
Local documents4PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $77.60 to $2,000.38. Based on 10 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • CELERITY GF125C-855737 GF125 BROOKS MASS FLOW CONTROLLER
  • GAS PALLET / BLOCK TYPE FUJIKIN / BROOKS GF125 MFC
  • T190338 Lot (3) Brooks Instruments GF125 Mass Flow Controller N2 Gas 280SCCM

Archived listings

Other Part Numbers & Aliases

GF125Brooks GF125Brooks Instrument GF125Brooks Instruments GF125GF125 SeriesBrooks GF125 Series