Brooks Instrument GF120 SDS Metal-Sealed Mass Flow Controller
About this part
GF120XSDC is a partial Brooks Instrument GF-series configured-code prefix for a GF120 metal-sealed thermal mass flow controller in SDS special-application context with normally closed valve context. Official Brooks GF100/GF120/GF125 documentation supports the high-purity all-metal flow path, GF120 SDS option context, configuration-dependent communication options, MultiFlo and non-MultiFlo code positions, materials, performance context, and installation guidance, but no verified official exact GF120XSDC-only PDF or build sheet is currently available The complete gas, full-scale range, fitting package, communication interface, surface finish, valve details, and customer-specific options require the full unit label or Brooks configuration record. Stored Sonisys auction evidence for this page is sparse and identifies GF120XSDC only as listing identity and market context, not as a source for official model-wide specifications
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF120XSDC
Device type
Brooks GF120-family metal-sealed thermal mass flow controller
Series family
Brooks GF100 / GF120 / GF125 metal-sealed mass flow controller and meter family
Model-code context
Read against official Brooks GF100/GF120/GF125 product-description-code tables, GF120XSDC indicates GF base model, GF120 package context, X non-MultiFlo-capable configured gas/range requirement, SD Safe Delivery System special application, and C normally closed valve context
Configuration
Configured-unit rule
GF120XSDC is not a complete build code; gas, full-scale range, fitting package, downstream condition, sensor orientation, communication connector, customer-special-request code, auto shut-off, auto zero, and reference-temperature details require the complete configured code or unit label
Applications
Application domain
Semiconductor, MOCVD, thin-film, implant, etch, and other high-purity process gas flow-control applications requiring an all-metal flow path
Flow
GF120 SDS flow-range context
Brooks GF100/GF120/GF125 ordering information identifies SD as a GF120 Safe Delivery System special-application option for greater than 25 sccm to 1 slpm N2-equivalent full-scale flow context; exact configured range must be read from the full model code or label
Gas/range configurability
Brooks product-code tables identify X configurability as not MultiFlo-capable with a specific gas and range required when used with SD or SL special-application context
Performance
Family accuracy context
Brooks GF100/GF120/GF125 analog and DeviceNet documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration for applicable configurations
Family repeatability context
Brooks GF100/GF120/GF125 documentation lists repeatability and reproducibility of +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5% for documented configurations
GF120 response context
Brooks product-code context lists GF120 package response at 700 ms; actual installed response depends on range, gas, valve package, and configuration
Ratings
Operating temperature context
Brooks GF100/GF120/GF125 documentation lists a 10 C to 50 C operating temperature range for documented family configurations
GF120 pressure-rating context
Brooks GF100/GF120/GF125 tables list GF120 maximum operating pressure as 100 psia max, proof pressure as 140 psia max, design pressure as 170 psia max, and burst pressure as 500 psia max for documented family configurations
Leak integrity
External leak integrity
Brooks GF100/GF120/GF125 documentation lists external leak integrity of 1 x 10^-10 atm cc/sec helium for documented family configurations
Materials
Wetted path standard
Brooks GF100/GF120/GF125 documentation describes SEMI F20 HP compliant wetted-material context
Wetted materials context
Brooks GF100/GF120/GF125 documentation lists wetted material context including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero leak-by valve configurations
GF120 surface-finish context
Brooks GF100-family ordering information lists GF120 package context with 5 microinch Ra surface finish
Controls
Communication interfaces
Brooks GF100-family documentation covers analog/RS-485, DeviceNet, RS485 diagnostic/service access, and EtherCAT communication options; the actual GF120XSDC unit interface depends on its complete configured electronics option
Mechanical
Valve context
The C valve-position context indicates normally closed valve configuration when interpreted using Brooks GF100/GF120/GF125 product-description-code tables
Observed variants
Stored auction gas/range combinations
No reliable gas/range table was extracted from the two stored Sonisys listing titles for GF120XSDC
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$2,521.63Based on archived listing records
Recorded price range$2,490.00 - $2,553.26Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $2,496.33 to $2,546.93. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
BROOKS GF120XSDC Brand New flowmeter By DHL or FedEX
