GF120X-908815 is a configured Brooks Instrument metal-sealed thermal mass flow controller identifier in the Brooks GF100 / GF120 / GF125 family. Official Brooks GF100/GF120/GF125 documentation covers the metal-sealed platform, GF120 Safe Delivery System context, communication options, MultiFlo support for applicable configurations, dimensional configurations, and installation/operation guidance, but no verified official one-part specification for GF120X-908815 is currently available Exact auction evidence identifies this configured code with GF120XSL wording and BF3 3 SCCM context. Verify gas, full-scale range, controller configuration, valve state, communication option, fitting package, surface finish, and any customer-specific markings from the physical unit label before reuse
Unit-specific configuration
Observed configuration
Historical listing records identify this part as BF3 at 3 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF120X-908815
Device type
Metal-sealed thermal mass flow controller
Series family
Brooks GF100 / GF120 / GF125 metal-sealed mass flow family
Observed model context
GF120XSL appears in exact auction evidence for this configured code; treat it as observed model context, not as an exact alias
Applications
Application domain
Semiconductor, MOCVD, thin-film, implant, etch, and high-purity process gas flow control
GF120 SDS context
Brooks family documentation describes the GF120 Safe Delivery System option as a low-pressure-drop mass flow controller for sub-atmospheric safe delivery system gases used in implant and etch processes
Performance
Family accuracy context
Brooks GF100/GF120/GF125 analog and DeviceNet documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration for applicable configurations
Family repeatability context
Brooks GF100/GF120/GF125 documentation lists repeatability and reproducibility of +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Family settling-time context
Brooks GF100/GF120/GF125 documentation lists normally closed valve settling-time bins from 300 ms to less than 700 ms across documented flow bins, and less than 3 seconds for documented GF120XSL/GF120XSD SDS configurations
Materials
Wetted path standard
Brooks GF100/GF120/GF125 documentation describes SEMI F20 HP compliant wetted materials for documented family configurations
Wetted materials context
Brooks GF100/GF120/GF125 documentation lists wetted material context including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero leak-by valve configurations
Controls
Communication interfaces
Analog/RS-485, DeviceNet, or EtherCAT depending on configured model and electronics option
Flow
Gas/range programmability
MultiFlo gas and range programmability is supported on applicable GF-series configurations; Brooks model-code documentation also identifies non-configurable SDS gas/range configurations
GF120XSL SDS flow-range context
Brooks family documentation identifies GF120XSL Safe Delivery System configurations for 4 to 25 sccm N2 equivalent; this is model-family context and does not verify the exact gas or range for GF120X-908815
Ratings
Operating temperature context
Brooks GF100/GF120/GF125 documentation lists a 10 C to 50 C operating temperature range for documented non-high-temperature family configurations
Configuration
Configured-unit rule
Gas, full-scale range, communication interface, valve or meter configuration, fitting package, seal package, surface finish, and process options vary by configured model code
Observed configuration
Stored auction gas/range evidence
BF3 and 3 SCCM appear in stored exact-part auction title evidence and exact auction item-specific evidence for this configured identifier
