GF120X-109751 is a configured Brooks Instrument metal-sealed thermal mass flow controller identifier in the Brooks GF100 / GF120 / GF125 family. Official Brooks documentation covers the GF100/GF120/GF125 metal-sealed platform, GF120XSD and GF120XSL model coverage, communication options, MultiFlo support, materials, ratings, and installation/operation guidance, but no verified official one-part specification for GF120X-109751 is currently available Sonisys auction history and exact listing evidence identify this configured code with GF120XSDO model wording, N2 gas, 1000 SCCM range, and EtherNet/IP interface wording. Verify gas, full-scale range, controller configuration, valve state, communication option, fitting package, surface finish, and any customer-specific markings from the physical unit label before reuse
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2 at 1000 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF120X-109751
Device type
Metal-sealed thermal mass flow controller
Series family
Brooks GF100 / GF120 / GF125 metal-sealed mass flow family
Observed model context
GF120XSDO appears in listing evidence for this configured code; treat it as observed model context, not as an exact alias
Applications
Application domain
Semiconductor, MOCVD, thin-film, implant, etch, and high-purity process gas flow control
Performance
Family accuracy context
Brooks GF100/GF120/GF125 analog and DeviceNet documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration for applicable configurations
Family repeatability context
Brooks GF100/GF120/GF125 documentation lists repeatability and reproducibility of +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Family settling-time context
Brooks GF100/GF120/GF125 documentation lists normally closed valve settling-time values by model and flow bin, depending on configuration
Materials
Wetted path standard
Brooks GF100/GF120/GF125 documentation describes SEMI F20 HP compliant wetted materials
Wetted materials context
Brooks GF100/GF120/GF125 documentation lists wetted material context including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero leak-by valve configurations
Controls
Communication interfaces
Analog/RS-485, DeviceNet, EtherCAT, or other configured interface options may apply depending on model and electronics package
Flow
Gas/range programmability
MultiFlo gas and range programmability is supported on applicable GF-series configurations
Ratings
Operating temperature context
Brooks GF100/GF120/GF125 documentation lists a 10 C to 50 C operating temperature range for documented family configurations
Configuration
Configured-unit rule
Gas, full-scale range, communication interface, valve or meter configuration, fitting package, seal package, surface finish, and process options vary by configured model code
Observed configuration
Stored auction gas/range evidence
N2 and 1000 SCCM appear in Sonisys stored auction evidence and listing evidence for this configured identifier
Observed interface evidence
Listing evidence identifies EtherNet/IP interface wording; verify interface and connector details against the physical unit label
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$1,505.25Based on archived listing records
Recorded price range$1,205.25 - $1,805.25Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $1,265.25 to $1,745.25. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks GF120X-109751 Mass Flow Controller MFC 1000 SCCM N2 Lot of 2 Working
Brooks GF120X-109751 Mass Flow Controller MFC 1000 SCCM N2 New
