GF120X-109623 is a configured Brooks Instrument metal-sealed thermal mass flow controller identifier in the Brooks GF100 / GF120 / GF125 family. Official Brooks GF100/GF120/GF125 documentation covers the metal-sealed platform, GF120 Safe Delivery System context, communication options, MultiFlo support for applicable configurations, dimensional configurations, and installation/operation guidance, but no verified official one-part specification for GF120X-109623 is currently available Exact listing evidence identifies this configured code with GF120XSD model wording; one exact seller listing reports 50 SCCM C4F6, EtherNet/IP, and surface-mount fitting, while another exact listing has conflicting title/search-visible range context. Verify gas, full-scale range, controller configuration, valve state, communication option, fitting package, surface finish, and any customer-specific markings from the physical unit label before reuse
Unit-specific configuration
Observed configuration
Historical listing records identify this part as C4F6 at 50 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF120X-109623
Device type
Metal-sealed thermal mass flow controller
Series family
Brooks GF100 / GF120 / GF125 metal-sealed mass flow family
Observed model context
GF120XSD appears in exact listing evidence for this configured code; treat it as observed model context, not as an exact alias
Applications
Application domain
Semiconductor, MOCVD, thin-film, implant, etch, and high-purity process gas flow control
GF120 SDS context
Brooks family documentation describes the GF120 Safe Delivery System option as a low-pressure-drop mass flow controller for sub-atmospheric safe delivery system gases used in implant and etch processes
Performance
Family accuracy context
Brooks GF100/GF120/GF125 analog and DeviceNet documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration for applicable configurations
Family repeatability context
Brooks GF100/GF120/GF125 documentation lists repeatability and reproducibility of +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Family settling-time context
Brooks GF100/GF120/GF125 documentation lists normally closed valve settling-time bins from 300 ms to less than 700 ms across documented flow bins, and less than 3 seconds for documented GF120XSL/GF120XSD SDS configurations
Materials
Wetted path standard
Brooks GF100/GF120/GF125 documentation describes SEMI F20 HP compliant wetted materials for documented family configurations
Wetted materials context
Brooks GF100/GF120/GF125 documentation lists wetted material context including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero leak-by valve configurations
Controls
Communication interfaces
Analog/RS-485, DeviceNet, EtherCAT, or EtherNet/IP depending on configured model and electronics option
Flow
Gas/range programmability
MultiFlo gas and range programmability is supported on applicable GF-series configurations; Brooks model-code documentation also identifies non-configurable SDS gas/range configurations
GF120XSD SDS flow-range context
Brooks family documentation identifies GF120XSD Safe Delivery System configurations above 25 sccm to 1 slpm N2 equivalent; this is model-family context and does not verify the exact gas or range for GF120X-109623
Ratings
Operating temperature context
Brooks GF100/GF120/GF125 documentation lists a 10 C to 50 C operating temperature range for documented non-high-temperature family configurations
Configuration
Configured-unit rule
Gas, full-scale range, communication interface, valve or meter configuration, fitting package, seal package, surface finish, and process options vary by configured model code
Observed configuration
Exact listing configuration evidence
GF120XSD model wording appears in exact listing evidence; one exact seller listing reports 50 SCCM C4F6, EtherNet/IP, surface-mount fitting, and CE marking for this configured identifier
Conflicting listing range evidence
A second exact listing title includes 50 SCCM C4F6, while search-visible listing text reports 12 SCCM Kr; treat the gas/range evidence as listing context only until the physical unit label is checked
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$2,002.75Based on archived listing records
Recorded price range$1,602.25 - $2,403.25Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $1,682.35 to $2,323.15. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks GF120X-109623 Mass Flow Controller MFC 50 SCCM C4F6 Lot of 2 New
Brooks GF120X-109623 Mass Flow Controller MFC GF120XSD Lot of 4 New
