Flow Control
GF120X-109608
Brooks Instrument Configured Metal-Sealed Thermal Mass Flow Controller
About this part
Brooks Instrument GF120X-109608 is a configured GF100 Series thermal mass flow controller identifier associated with Applied Materials part 0190-80045. The recorded configuration is 50 sccm SiCl4 with EtherCAT communication and a surface-mount fitting. Brooks documentation defines the GF120X prefix as the GF high-purity platform, GF120 package, and a specific-gas/range configuration that is not MultiFlo capable. The six-digit suffix is not decoded by the ordering table; the exact seal footprint, valve state, downstream condition, and calibration require the unit label or manufacturer/OEM build record
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Device type | Configured metal-sealed thermal mass flow controller for gases |
| Product family | GF100 Series, GF120 model line |
| Configurability marker | The documented X code denotes a non-MultiFlo configuration for which a specific gas and range are required |
| GF120 model-line envelope | 3 sccm through 55 slpm N2-equivalent in the applicable standard-flow EtherCAT family data sheet; the configured gas and range determine actual use |
| GF120 EtherCAT accuracy context | ±1% of set point over 20-100% full scale and ±0.2% full scale over 2-20%, based on factory N2 calibration, for applicable standard-flow EtherCAT configurations |
| GF120 settling-time context | 700 ms for the documented GF120 normally closed valve configuration; valve and build options must be confirmed for the exact unit |
| GF120 wetted-path context | SEMI F20-compliant all-metal wetted path; the EtherCAT ordering table associates the GF120 package with 5 µin Ra surface finish |
| EtherCAT family interface | Applicable GF100 Series EtherCAT configurations use twin RJ45 communication connections, a 5-pin M8 power connector, and a Micro-USB diagnostic port |
| Family application domain | Semiconductor etch, implant, thin-film deposition, MOCVD, and other high-purity process-gas systems |
What Does GF120X-109608 Mean?
The prefix can be interpreted from Brooks model-code documentation. The compact numeric suffix is not a publicly decoded ordering-code segment.
| Segment | Field | Interpretation |
|---|---|---|
| GF | Base model | High-purity / ultra-high-purity digital mass flow controller platform. |
| 120 | Package / finish | GF120 standard-flow package: 3 sccm to 55 slpm N2-equivalent, documented 700 ms response, and 5 µin Ra surface-finish context. |
| X | Configurability | Not MultiFlo capable; a specific gas and range are required. The standard ordering table uses X with SL or SD special-application codes, which are absent from this compact identifier, so no SDS subtype should be inferred. |
| 109608 | Configured identifier suffix | Not defined as a segment in the current public full model-code table. It does not independently disclose the gas, range, fitting, valve, communication, or calibration options. |
SiCl4 Operating Context
The recorded configuration identifies SiCl4. Brooks specifically lists SiCl4 as an example of a low-vapor-pressure gas in its EtherCAT family data sheet.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,211.24 to $1,211.24. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument GF120X-109608 Mass Flow Controller MFC AMAT 0190-80045 New