Flow Control
GF120X-109489
Brooks Instrument Metal-Sealed Thermal Mass Flow Controller
About this part
GF120X-109489 identifies a Brooks Instrument GF100-Series metal-sealed digital thermal mass flow controller for high-purity gas service. Brooks model-code tables establish that X denotes a non-MultiFlo configuration requiring a specific gas and range. This shortened identifier does not disclose the special application, gas, full-scale range, valve, fitting, or communications interface; those details require the complete product label or Brooks build record
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Product family | GF100 Series metal-sealed high-purity and ultra-high-purity thermal mass flow controllers and meters for gases |
| Exact configured identifier | GF120X-109489 |
| Observed device type | Mass flow controller |
| Configurability code | X — not MultiFlo capable; a specific gas code and full-scale range are required |
| Special application | Not established by the shortened identifier. The GF100 model table requires X with an SD, SL, or HA special application, while the separate current high-temperature table uses HT nomenclature |
| Configured gas and range | Not established; obtain the complete model code, product label, certificate of conformance, or Brooks build record |
| Published family accuracy context | The current GF100 analog/DeviceNet data sheet lists ±1% of set point from 35-100% full scale and ±0.35% full scale from 2-35%, based on factory N2 calibration. Do not assert this as the unit's certified performance without its configuration record |
| Published family repeatability context | The current GF100 family data sheet lists ±0.15% of set point from 5-100% and ±0.015% full scale from 2-5% for applicable configurations |
| Family wetted-path context | All-metal high-purity flow path with SEMI F20 HP-compliant materials; exact wetted components and surface finish remain configuration dependent |
| Valve configuration | Not established; GF-family options include normally closed, normally open on applicable models, and meter configurations without a valve |
| Process connection and footprint | Not established by GF120X-109489 |
| Installed communications interface | Not established; connector or complete model-code evidence is required |
| Family application context | Semiconductor etch, implant, MOCVD, CVD, ALD, PVD, epitaxial, strip, and other high-purity gas-flow applications |
What Does GF120X-109489 Mean?
The public Brooks ordering tables decode the GF120X prefix, but they do not define the hyphenated six-digit suffix as an ordering-code field.
| Segment | Field | Interpretation |
|---|---|---|
| GF | Base model | High-purity/ultra-high-purity digital mass flow controller platform |
| 120 | Package/application platform | The standard GF100 analog/DeviceNet table associates 120 with a 3 sccm-55 slpm N2-equivalent envelope, 700 ms base response, and 5 µin Ra finish. The separate GF120xHT table instead defines a 50 sccm-5 slpm envelope, so these values are not configured-unit specifications until the special application is established. |
| X | Configurability | Not MultiFlo capable; a specific gas code and range are required. The main table requires an SD, SL, or HA special application. |
| 109489 | Configured-part suffix | No public Brooks ordering field maps this six-digit suffix. It must not be decoded into gas, range, valve, fitting, protocol, or application options without a Brooks build record. |
Documented GF120X Special-Application Boundaries
These are documented configuration possibilities, not identified specifications for GF120X-109489.
| Code | Application | Published boundary |
|---|---|---|
| SL | Safe Delivery System | GF120 only; 4-25 sccm N2-equivalent full-scale range |
| SD | Safe Delivery System | GF120 only; above 25 sccm through 1 slpm N2-equivalent full-scale range |
| HA / HT | High-temperature configuration | The main GF100 table references HA but does not define it in the option list. The current dedicated GF120xHT table uses HT, lists 50 sccm-5 slpm N2-equivalent, and supports flow-module temperatures through 150°C. Do not equate or assign these codes to this unit without exact build evidence. |
Replacement and Installation Verification
Matching the shortened identifier alone is insufficient for replacement compatibility.
- Verify the complete special-application code.
- Verify the process gas and calibrated full-scale range.
- Verify controller versus meter construction and valve state.
- Verify fitting type, body width, length, seal geometry, and footprint.
- Verify downstream-condition and sensor-orientation options.
- Verify connector, pinout, communications protocol, and DeviceNet parameters where applicable.
- Verify customer-special-request settings, auto-shutoff, auto-zero, and reference temperature.
- For a high-temperature build, verify calibrated operating temperature, remote-electronics configuration, and cable length.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,211.24 to $1,211.24. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument GF120X-109489 Mass Flow Controller MFC AMAT 0190-63822 New