Brooks Instrument GF120XSL BF3 10 SCCM Safe Delivery System Mass Flow Controller
About this part
Brooks Instrument GF120X-102019 is a GF120XSL metal-sealed thermal mass flow controller configured for boron trifluoride at 10 SCCM full scale. The label model code identifies a non-MultiFlo, normally closed, low-flow Safe Delivery System configuration with a 92 mm C-seal fitting, vacuum downstream condition, default sensor orientation, and analog-only TX interface. Brooks designed the GF120XSL for sub-atmospheric SDS gas delivery in implant and etch processes
Configurations vary. Verify the exact unit before choosing a replacement.
ManufacturerBrooks Instrument GF100 Series / GF120XSL
Part numberGF120X-102019
Product familyGF100 Series
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Manufacturer
Brooks Instrument
Configured part number
GF120X-102019
Model
GF120XSL
Device function
Metal-sealed high-purity/ultra-high-purity thermal mass flow controller for gases
Applications
Specialty application
Low-pressure-drop Safe Delivery System gas delivery for implant and etch processes
Flow
Configured gas
Boron trifluoride (BF3), established by the physical label
Configured full-scale range
10 SCCM, established by the physical label
GF120XSL model range
4-25 sccm N2-equivalent full scale; the configured unit is 10 SCCM BF3
Configuration
Gas/range configurability
Not MultiFlo capable (model-code option X); a specific gas and range are required
Mechanical
Valve configuration
Normally closed (model-code option C)
Fitting
CX: 1-1/8-inch body width, 92 mm C-seal configuration
Process
Downstream condition
Vacuum (model-code option V)
Sensor
Sensor orientation
Default orientation (model-code option O)
Controls
Installed main interface
TX industry-standard analog-only interface
Analog signals
0-5 Vdc setpoint and 0-5 Vdc output
Diagnostic interface
Separate RS-485 diagnostic/service port via 2.5 mm jack
Performance
Published GF120XSL accuracy context
±1% of set point over >35-100% full scale and ±0.35% full scale over 2-35%, based on factory N2 calibration; Brooks directs users to Applications Engineering for analog-communication accuracy
Published repeatability and reproducibility
±0.15% of set point over 5-100% full scale and ±0.015% full scale over 2-5%
Published settling-time context
Less than 3 seconds for a normally closed GF120XSL; Brooks directs users to Applications Engineering for analog-communication response
Control range
2-100% full scale with normally closed valve
Zero stability
Published GF120XSL value is less than ±0.6% full scale per year
Operating conditions
Operating temperature
10-50 °C
Differential pressure context
10 Torr to 30 psid typical; actual pressure drop depends on gas and flow
Materials
Wetted-path context
GF120XSL documentation lists SEMI F20 HP-compliant materials including 316L VIM/VAR, Hastelloy C-22, 316L and 304 stainless steel, and KM-45; PCTFE applies only to the optional zero-leak valve
Surface finish
5 µin Ra model-code context
Integrity
External leak integrity
Published GF120XSL value is 1 × 10^-10 atm cc/sec helium
Electrical
Analog power context
6 W maximum at ±15 Vdc (±10%) or +24 Vdc (±10%)
What Does GF120X-102019 Mean?
GF120X-102019 is the configured Brooks part number shown on the unit label. The public ordering table decodes the model-code fields but does not assign a published meaning to the six-digit 102019 suffix.
Segment
Field
Interpretation
GF
Base model
High-purity/ultra-high-purity digital mass flow controller
120
Package/performance model
GF120 high-performance, non-PTI platform with 5 µin Ra finish; the selected SL specialty application supplies the applicable low-flow SDS range and response specifications
X
Configurability
Not MultiFlo capable; specific gas and range required
SL
Special application
Low-flow Safe Delivery System configuration, documented for 4-25 sccm N2-equivalent full scale
C
Valve
Normally closed
0048 / 010C
Gas and range
The label identifies gas code 0048 as boron trifluoride and 010C as 10 SCCM
CX
Fitting
1-1/8-inch body width, 92 mm C seal
V
Downstream condition
Outlet to vacuum
O
Sensor
Default sensor orientation
TX
Interface
Industry-standard analog-only interface
102019
Configured part suffix
Exact assigned part-number suffix; it is not decoded by the public Brooks ordering table and must not be represented as a gas, range, CSR, or serial number
TX Analog Interface
The installed TX main connector is analog-only. RS-485 remains available through the separate diagnostic/service port rather than through the TX main I/O.
Setpoint0-5 Vdc
Output0-5 Vdc
Main-interface communicationsAnalog only
Diagnostic communicationsRS-485 through a separate 2.5 mm service jack
Power6 W maximum at ±15 Vdc (±10%) or +24 Vdc (±10%)
