GF120X-100702 is a configured Brooks Instrument metal-sealed thermal mass flow controller identifier in the Brooks GF100 / GF120 / GF125 family. Official Brooks GF100/GF120/GF125 documentation covers the metal-sealed platform, GF120 safe delivery system context, communications, MultiFlo support, dimensional configurations, and installation/operation guidance, but no verified official one-part specification for GF120X-100702 is currently available Sonisys auction history and surplus and listing evidence identify this configured code with GF120XSD model context, 200 SCCM range, 15%B2H6/H2 gas mixture wording, 9-pin D interface wording, 4VCR fitting wording, and CE-marked wording. Verify gas mixture, full-scale range, controller configuration, valve state, communication option, fitting package, surface finish, and any customer-specific markings from the physical unit label before reuse
Unit-specific configuration
Observed configuration
Historical listing records identify this part as 15%B2H6/H2 at 200 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF120X-100702
Device type
Metal-sealed thermal mass flow controller
Series family
Brooks GF100 / GF120 / GF125 metal-sealed mass flow family
Observed model context
GF120XSD appears in surplus listing evidence for this configured code; treat it as observed model context, not as an exact alias
Applications
Application domain
Semiconductor, MOCVD, thin-film, implant, etch, and high-purity process gas flow control
Performance
Family accuracy context
Brooks GF100/GF120/GF125 analog and DeviceNet documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration for applicable configurations
Family repeatability context
Brooks GF100/GF120/GF125 documentation lists repeatability and reproducibility of +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Family settling-time context
Brooks GF100/GF120/GF125 documentation lists normally closed valve settling-time bins from 300 ms to less than 700 ms across documented flow bins, depending on configuration
Materials
Wetted path standard
Brooks GF100/GF120/GF125 documentation describes SEMI F20 HP compliant wetted materials
Wetted materials context
Brooks GF100/GF120/GF125 documentation lists wetted material context including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero leak-by valve configurations
Controls
Communication interfaces
Analog/RS-485, DeviceNet, or EtherCAT depending on configured model and electronics option
Flow
Gas/range programmability
MultiFlo gas and range programmability is supported on applicable GF-series configurations
Ratings
Operating temperature context
Brooks GF100/GF120/GF125 documentation lists a 10 C to 50 C operating temperature range for documented family configurations
Configuration
Configured-unit rule
Gas, full-scale range, communication interface, valve or meter configuration, fitting package, seal package, surface finish, and process options vary by configured model code
Observed configuration
Stored auction gas/range evidence
200 SCCM and 15%B2H6/H2 appear in surplus listing evidence for this configured identifier
Observed interface and fitting evidence
Surplus listing evidence identifies a 9-pin D interface, 4VCR (1/4 in) fitting, and CE-marked wording; verify all configuration details against the physical unit label
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$1,179.01Based on archived listing records
Recorded price range$1,148.77 - $1,209.24Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $1,154.82 to $1,203.19. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks Instrument GF120X-100702 Mass Flow Controller MFC 200 SCCM 15%B2H6/H2 New
Brooks Instrument GF120X-100702 Mass Flow Controller MFC 200 SCCM 15²H6/H2 New
