Brooks Instrument GF120 Series Metal-Sealed Mass Flow Controller
About this part
GF120C is a Brooks Instrument GF120-family metal-sealed thermal mass flow controller code used on configured GF-series gas-flow devices. Official Brooks GF100/GF120/GF125 documentation covers the high-purity all-metal platform, MultiFlo-capable configurations, communication options, performance context, materials, and installation guidance, but no verified official GF120C-only one-part PDF is currently available Gas, full-scale range, valve state, fitting package, communication interface, surface finish, and any customer-specific suffix details must be verified from the complete unit label or build record. Stored Sonisys auction history shows GF120C units across multiple observed gas/range combinations, including N2, Ar, N2O, C4F8, NF3, H2, and SiH4 contexts; those observations are market evidence, not model-wide specifications
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF120C
Device type
Metal-sealed thermal mass flow controller
Series family
Brooks GF100 / GF120 / GF125 metal-sealed mass flow controller and meter family
Model-code context
Brooks GF100-family ordering information identifies GF120 as the 5 Ra GF120 package; the following C position indicates MultiFlo-capable configuration context when used in a complete Brooks model code
Configuration
Configured-unit rule
GF120C is not a complete build code; gas, full-scale range, special application, valve or meter configuration, fitting package, electrical connector, communication protocol, display, seal package, and customer/OEM options require the full configured model code or unit label
Applications
Application domain
Semiconductor, MOCVD, thin-film, implant, etch, and other high-purity gas flow control applications requiring an all-metal flow path
Flow
GF120 family flow-range context
Brooks GF100-family ordering information lists GF120 package context as 3 sccm to 55 slpm N2-equivalent; exact range for a GF120C unit depends on the full configured code and calibration
Safe Delivery System context
Brooks documentation lists GF120 SD and SL as Safe Delivery System special-application options; do not assume SDS service unless the complete code or unit label shows that option
Gas/range programmability
The C configurability position indicates MultiFlo-capable context in the Brooks GF100/GF120/GF125 product-code tables; supported gas and range selections depend on the configured gas code or SH MultiFlo bin
Performance
Family accuracy context
Brooks GF100/GF120/GF125 analog and DeviceNet documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration for applicable configurations
Family repeatability context
Brooks GF100/GF120/GF125 documentation lists repeatability and reproducibility of +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Family settling-time context
Brooks documentation lists GF120 family response context at 700 ms and normally closed GF100/GF125 valve settling-time bins from 300 ms to less than 700 ms, depending on configured range and valve package
Ratings
Operating temperature context
Brooks GF100/GF120/GF125 documentation lists a 10 C to 50 C operating temperature range for documented family configurations
GF120 pressure-rating context
Brooks GF100/GF120/GF125 tables list GF120 maximum operating pressure as 100 psia max, proof pressure as 140 psia max, design pressure as 170 psia max, and burst pressure as 500 psia max for documented family configurations
Leak integrity
External leak integrity
Brooks GF100/GF120/GF125 data-sheet tables list external leak integrity of 1 x 10^-10 atm cc/sec helium
Materials
Wetted path standard
Brooks GF100/GF120/GF125 documentation describes SEMI F20 HP compliant wetted materials
Wetted materials context
Brooks GF100/GF120/GF125 documentation lists wetted material context including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero leak-by valve configurations
GF120 surface-finish context
Brooks GF100-family ordering information lists GF120 package context with 5 microinch Ra surface finish
Controls
Communication interfaces
Brooks GF100-family documentation covers Analog/RS-485, DeviceNet, RS485 diagnostic/service access, and EtherCAT communication options; the actual interface depends on the configured electronics option
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records85Tracked historical listing records
Historical median price$750.00Based on archived listing records
Recorded price range$126.00 - $2,604.25Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $166.39 to $1,804.85. Based on 85 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
BROOKS Used good Repaired GF120C N2 10000SCCM SH47 MFC-I-341=2M32
