Flow Control

GF120C-916426

Brooks Instrument GF120 Mass Flow Controller

About this part

GF120C-916426 is a configured Brooks Instrument GF120 metal-sealed thermal mass flow controller or meter identifier in the Brooks GF100 / GF120 / GF125 family. Official Brooks GF100/GF120/GF125 documentation covers the metal-sealed platform, communications, MultiFlo support, dimensional configurations, and installation/operation guidance. Sonisys auction history currently includes three tracked listing records for this exact configured code, with N2 appearing across the stored titles and 200 SCCM appearing in two of those records. Verify gas, full-scale range, controller-versus-meter configuration, valve state, communication option, fitting package, and any customer-specific markings from the physical unit label before reuse

Unit-specific configuration
Observed configuration

Historical listing records identify this part as N2 at 200 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

No archived photo available

Key Facts

ManufacturerBrooks Instrument
Part numberGF120C-916426
Product familyGF100 Series
Device typeThermal Mass Flow Device
Observed gasN2
Observed full-scale range200 SCCM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Part identifierGF120C-916426
Device typeMetal-sealed thermal mass flow controller or meter
Series familyBrooks GF100 / GF120 / GF125 metal-sealed mass flow family
Applications
Application domainSemiconductor, MOCVD, thin-film, and high-purity process gas flow control
Performance
Family accuracy contextBrooks GF100/GF125 analog and DeviceNet documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration
Family settling-time contextBrooks GF100/GF125 documentation lists normally closed valve response from 300 ms to less than 700 ms across listed flow bins
Materials
Wetted path standardBrooks GF100/GF125 documentation describes SEMI F20 HP compliant wetted materials
Controls
Communication interfacesAnalog/RS-485, DeviceNet, or EtherCAT depending on configured model and electronics option
Flow
Gas/range programmabilityMultiFlo gas and range programmability is supported on applicable GF-series configurations
Observed configuration
Stored auction gas/range evidenceN2 200 SCCM appears in two stored listing records; one additional stored title identifies N2 without a range
Secondary marking context3030-16833 and US+9386 appear in one stored auction title and should be checked against the physical label before use as procurement identifiers
Configuration
Configured-unit ruleGas, full-scale range, communication interface, valve or meter configuration, fitting package, seal package, and process options vary by configured model code

Documentation Downloads

Local PDF copies

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records3Tracked historical listing records
Historical median price$199.95Based on archived listing records
Recorded price range$189.00 - $245.00Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $191.19 to $235.99. Based on 3 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks Instrument GF120C-916426 Thermal Mass Flow,N2 200sccm,3030-16833,US+9386
  • Brooks Instrument GF120C-916426 N2 Thermal Mass Flow Meter

Archived listings

Other Part Numbers & Aliases

GF120C-916426Brooks GF120C-916426Brooks Instrument GF120C-916426Brooks Instruments GF120C-916426