Flow Control
GF120C-202273
Brooks Instrument GF120CXXC Mass Flow Controller
About this part
GF120C-202273 is a configured Brooks Instrument GF120CXXC metal-sealed thermal mass flow controller identifier in the Brooks GF100 / GF120 / GF125 family. Official Brooks GF100/GF120/GF125 documentation covers the metal-sealed platform, communications, MultiFlo support, dimensional configurations, and installation/operation guidance. Sonisys auction history currently includes one completed listing and one active listing record for this exact configured code, both identifying C4F8 50 SCCM context. exact listing evidence also reports model code GF120CXXC-0129050C-CXVOTX-XXXXXX-000, customer part number E23001503, 9-Pin D interface, and surface-mount fitting. Verify gas, range, communication option, fitting package, valve state, and any customer-specific configuration from the physical unit label before reuse
Unit-specific configuration
Historical listing records identify this part as C4F8 at 50 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Part identifier | GF120C-202273 |
| Device type | Metal-sealed thermal mass flow controller |
| Observed full model code | GF120CXXC-0129050C-CXVOTX-XXXXXX-000 appears in exact listing evidence for this configured code |
| Series family | Brooks GF100 / GF120 / GF125 metal-sealed mass flow family |
| Application domain | Semiconductor, MOCVD, thin-film, and high-purity process gas flow control |
| Family accuracy context | Brooks GF100/GF125 analog and DeviceNet documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration |
| Family settling-time context | Brooks GF100/GF125 documentation lists normally closed valve response from 300 ms to less than 700 ms across listed flow bins |
| Wetted path standard | Brooks GF100/GF125 documentation describes SEMI F20 HP compliant wetted materials |
| Communication interfaces | Analog/RS-485, DeviceNet, or EtherCAT depending on configured model and electronics option |
| Gas/range programmability | MultiFlo gas and range programmability is supported on applicable GF-series configurations |
| Reported gas and range | 50 SCCM C4F8 appears in stored auction titles and exact listing evidence |
| Customer part number context | E23001503 appears in exact listing evidence; treat as customer or manufacturer part context until verified on the physical label |
| Reported interface | 9-Pin D appears in exact listing evidence; verify against the physical connector and electronics option |
| Reported fitting | Surface mount appears in exact listing evidence; verify against the physical manifold interface |
| Configured-unit rule | Gas, full-scale range, communication interface, valve state, fitting package, seal package, and process options vary by configured model code |
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $834.07 to $1,114.64. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument GF120C-202273 Mass Flow Controller MFC 50 SCCM C4F8 New