GF101C-200132 is a configured Brooks Instrument GF101C high-flow thermal mass flow controller observed in Sonisys auction history as a 200,000 SCCM air unit. Official Brooks GF100/GF120xHT/GF101 documentation covers the GF101 high-flow family and identifies GF101/GF121/GF126 devices as 55 to 300 slm mass flow controllers or meters with MultiFlo support and a high-purity metal-sealed flow path. The exact gas calibration, full-scale range, fitting, communication interface, valve configuration, and customer-special details must be verified from the physical label and full configured model code
Unit-specific configuration
Observed configuration
Historical listing records identify this part as Air at 200,000 SCCM / 200 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Configured part number
GF101C-200132
Device type
High-flow thermal mass flow controller
Series family
Brooks GF100 / GF101 / GF120 / GF121 / GF125 / GF126 metal-sealed mass flow controller and meter family
GF101 role
GF101 is the 55 to 300 slm high-flow package in the GF100/GF101 family
Observed configuration
Observed gas
Air
Observed full-scale flow
200,000 SCCM / 200 SLM
Observed description
Stored auction titles describe GF101C-200132 as a Brooks Instrument mass flow controller, MFC, 200000 SCCM, air
Configuration
Configured-unit rule
Gas, full-scale range, communication interface, valve state, fitting package, surface finish, and customer/OEM suffix details vary by configured model code
Applications
Application domain
Semiconductor, MOCVD, thin-film, and high-purity gas flow control applications requiring a high-purity all-metal flow path
Performance
GF101 full-scale flow range
Official GF100 Series data-sheet specifications list GF101/GF121/GF126 full-scale flow range as 55 slm to 300 slm
Flow accuracy
Official GF101/GF121/GF126 specifications list +/-1% of set point from 35-100% and +/-0.35% full scale from 2-35%, based on factory N2 calibration
Repeatability and reproducibility
Official GF101/GF121/GF126 specifications list less than +/-0.15% of set point
Response time
Official GF101/GF121/GF126 specifications list normally closed valve response time as less than 1 second
Control range
Official GF101/GF121/GF126 specifications list 5-100% control range for normally closed valve configurations
Pressure
Differential pressure range
Official GF101/GF121/GF126 specifications list 30-90 psid differential pressure range
Maximum operating pressure
Official GF101/GF121/GF126 specifications list 75 psig maximum for controller configurations and 150 psig maximum for meter configurations
External leak integrity
Official GF101/GF121/GF126 specifications list 1 x 10^-10 atm cc/sec helium external leak integrity
Materials
Wetted path standard
Official GF101/GF121/GF126 specifications list SEMI F20 HP compliant wetted materials
Wetted material context
Documented wetted materials include 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, and KM-45
Controls
Gas/range programmability
MultiFlo gas and range configurability is documented for supported GF100/GF101-family devices
Communication interfaces
Official documentation includes Analog/RS485, DeviceNet, and EtherCAT interface contexts depending on the configured model
Diagnostic/service port
Official GF101/GF121/GF126 specifications list an RS485 diagnostic/service port via 2.5 mm jack
Electrical
Analog/RS485 power context
Official GF101/GF121/GF126 specifications list RS485/Analog power consumption as 6 W maximum at +/-15 VDC or +24 VDC, both +/-10%
DeviceNet power context
Official GF101/GF121/GF126 specifications list DeviceNet power consumption up to 545 mA at +11-25 VDC and 250 mA at 24 VDC under typical operating conditions
Operating environment
Operating temperature
Official GF101/GF121/GF126 specifications list 10 C to 50 C operating temperature range
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records3Tracked historical listing records
Historical median price$1,209.25Based on archived listing records
Recorded price range$1,202.25 - $1,209.25Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $1,203.65 to $1,209.25. Based on 3 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks GF101C-200132 Mass Flow Controller MFC GF101CXXC 200000 SCCM 8-Air New Su
Brooks Instrument GF101C-200132 Mass Flow Controller MFC 200000 SCCM 8-Air New
Brooks Instrument GF101C-200132 Mass Flow Controller MFC 200000 SCCM 8-AIR New
