Brooks Instrument GF100 Series Mass Flow Controller
About this part
GF100C-930021 is a configured Brooks Instrument GF100 Series metal-sealed thermal mass flow controller identifier observed in Sonisys auction records. Official Brooks GF100/GF120/GF125 family documentation supports the metal-sealed high-purity MFC/MFM context, MultiFlo gas/range configurability, and family-level performance, material, and communication-interface data. no verified official Brooks exact-part PDF or manufacturer page is currently available for GF100C-930021, so exact gas, range, interface, fitting, valve state, surface finish, and customer configuration should be verified from the physical unit label or Brooks configuration record
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF100C-930021
Observed device type
Configured Brooks GF100 Series metal-sealed thermal mass flow controller
Official family context
Brooks document library groups GF100, GF101, GF120, GF120XSD, GF120XSL, GF121, GF125, and GF126 under GF100 metal-sealed mass flow controllers and meters
Observed title context
Stored marketplace records identify the exact configured identifier GF100C-930021 and include GF100CXXC as observed title context; GF100CXXC is not treated as an exact alias
Configuration
Configured-unit rule
Gas, full-scale flow range, communication interface, valve state, fitting package, surface finish, and process options vary by configured model code and should be checked on the physical label or Brooks configuration record
Applications
Application domain
Official GF100 family documentation describes semiconductor, MOCVD, thin-film, and other high-purity all-metal gas flow-control applications
Flow
GF100 full-scale flow context
Brooks GF100 analog/DeviceNet data sheet lists GF100 full-scale flow range as 3 sccm to 55 slm N2 equivalent; actual configured range must be read from the unit label
Gas/range programmability
Brooks MultiFlo documentation supports programming applicable GF1XX thermal mass flow devices across supported gases and ranges
Performance
Family flow accuracy
Brooks GF100 analog/DeviceNet data sheet lists flow accuracy as +/-1% of set point from 35-100% and +/-0.35% full scale from 2-35%, based on factory N2 calibration
Family repeatability and reproducibility
Repeatability and reproducibility as +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Family flow settling time
GF100 normally closed valve response time as less than 1 second and normally open valve response time as less than 1.5 seconds
Ratings
Operating temperature range
10 to 50 C in official GF100 analog/DeviceNet data sheet
Pressure ratings
GF100 maximum operating pressure as 500 psia, proof pressure as 700 psia, design pressure as 800 psia, and burst pressure as 3000 psia
Materials
Wetted path standard
SEMI F20 high-purity compliant wetted-material context for documented GF100-family configurations
Mechanical
Valve and meter options
GF100-family documentation includes normally closed, normally open, and meter/no-valve variants depending on configuration
Controls
Communication interfaces
Brooks GF100-family documentation covers analog 0-5 VDC, RS485, DeviceNet, and EtherCAT communication options; the actual GF100C-930021 interface depends on its configured unit code
Observed variants
Stored auction gas/range combinations
No reliable gas/range table was extracted from stored titles for this exact part identifier
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$859.44Based on archived listing records
Recorded price range$480.52 - $1,238.37Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $556.31 to $1,162.59. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
