Flow Control
GF100C-912104
Brooks Instrument GF100 Series Metal-Sealed Thermal Mass Flow Controller
About this part
GF100C-912104 identifies a Brooks Instrument GF100-platform mass flow controller with the “C” MultiFlo-capable configuration code. An exact-unit marketplace record identifies nitrogen service and a 2600 SCCM full-scale range. The shortened identifier does not disclose the complete product-description code, so valve state, fittings, communications, downstream condition, customer-special requirements, and calibration details remain dependent on the unit label or manufacturer configuration record
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Model platform | GF100 standard-performance, non-pressure-transient-insensitive metal-sealed digital mass flow platform |
| Configurability code | The “C” following GF100 denotes a MultiFlo-capable configuration; Brooks permits a standard flow bin or a specific gas/range on this platform |
| GF100 model flow envelope | 3 sccm to 55 slpm nitrogen-equivalent; the exact configured full scale is unit-specific |
| Accuracy context | For applicable GF100 analog and DeviceNet configurations, the dated 2025-07 family data sheet specifies ±1% of set point from 35% to 100% full scale and ±0.35% of full scale from 2% to 35%, based on factory nitrogen calibration |
| Repeatability and reproducibility context | For applicable configurations, ±0.15% of set point from 5% to 100% and ±0.015% of full scale from 2% to 5% |
| Valve response context | GF100 settling time is less than 1 second with a normally closed valve; the family lists less than 1.5 seconds for normally open configurations. The installed valve configuration is not encoded by the shortened identifier |
| Control range context | 2% to 100% with a normally closed valve or 3% to 100% with a normally open valve; the exact valve state is unverified |
| GF100 surface finish | The current product-description-code table assigns the GF100 platform a 10 µin Ra high-purity wetted-flow-path finish |
| Wetted-path context | SEMI F20 HP-compliant, all-metal high-purity flow path. Documented family materials include 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, and KM-45; exact valve components depend on configuration |
| Operating temperature | 10°C to 50°C for standard GF100-series configurations |
| Maximum operating pressure context | 500 psia maximum for the standard GF100-series platform |
| Available communication contexts | Analog/RS-485, DeviceNet, and EtherCAT configurations are documented for the GF100 family. The installed interface cannot be determined from GF100C-912104 alone |
| Family application domain | Semiconductor etch, thin-film deposition, MOCVD, PVD, epitaxial processing, and other high-purity gas-flow applications |
Identifier interpretation
Only the GF100C prefix can be decoded from the shortened identifier. The six-digit suffix is not a substitute for Brooks’ complete product-description code.
| Identifier element | Supported interpretation | Boundary |
|---|---|---|
| GF100 | Standard-performance GF100 metal-sealed flow platform; non-PTI | Does not establish valve, fitting, interface, gas, range, or calibration. |
| C | MultiFlo-capable configurability option | Supports reconfiguration only within applicable hardware, flow-bin, gas-database, and copy-exact constraints. |
| 912104 | Exact shortened configured-unit reference | No public Brooks cross-reference or build sheet was located for decoding this suffix. |
| Observed 2600 SCCM | The current Brooks table places 2600 SCCM at the upper boundary of SH45, whose nitrogen-equivalent span is 861–2600 SCCM | The actual stored bin and complete product-description code require label or electronic configuration evidence. |
Configuration and software support note
Brooks continues to make the MultiFlo Configurator available but classifies it as an unsupported legacy Windows application. Windows 11 security updates may prevent operation, and Brooks recommends its Expert Support Tool for ongoing compatibility. Gas-database and configurator changes can affect copy-exact requirements; facilities governed by an approved configuration should retain the approved software and database combination until changes are formally qualified.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $119.99 to $119.99. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks GF100C-912104 N2 Mass Flow Controller/Thermal Mass Flow 2600SCCM