Flow Control

GF100C-861729

Brooks Instrument GF100 Series 8000 SCCM DeviceNet Thermal Mass Flow Controller

About this part

Brooks GF100C-861729 is a metal-sealed, high-purity GF100 Series thermal mass flow controller. Its Brooks conformance and calibration label identifies an 8000 SCCM full-scale configuration for 50% dichloromethylsilane in hydrogen (50% CH3SiHCl2/H2), an SH48 MultiFlo bin, a normally closed valve, 1000 ms response, 2% full-scale overshoot, and reference conditions of 0°C and 760 Torr. Exterior controls and the five-pin Micro M12 connector establish DeviceNet communication. GF100C-861729 is a Brooks part number rather than the complete configurable product-description code, so the fitting and other unlisted build options require the full PDC or manufacturer configuration record

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Instrument GF100 Series
Part numberGF100C-861729
Product familyGF100 Series
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
ManufacturerBrooks Instrument
Brooks part numberGF100C-861729
Model numberGF100C
SeriesGF100 Series
Serial numberB1053023431
Model-code meaningGF100 identifies the standard-performance, non-PTI GF100 platform; C identifies a MultiFlo-capable configuration
Process configuration
Process gas50% CH3SiHCl2/H2 (50% dichloromethylsilane/hydrogen)
Full-scale flow range8000 SCCM
MultiFlo binSH48
Valve configurationNormally closed
Performance
Response setting1000.00 ms
Overshoot2% of full scale
Calibration
Reference conditions0°C and 760 Torr
Nitrogen test pressure35 psig
Calibration-gas accuracy shown on label1% of setpoint
Calibration timestamp2011-02-01 1:34:33 PM
Device version shown on label1.14
Controls
Digital communicationDeviceNet
Network connectorFive-pin Micro M12
Customer special request code0924

Process range and SH48 bin interpretation

The 8000 SCCM value is the configured full-scale flow for the stated process-gas mixture. SH48 is the controller's nitrogen-equivalent MultiFlo calibration bin; the current GF100 manual assigns SH48 to 15,001–30,000 SCCM N2 equivalent. The approximately 30,000 SCCM nitrogen calibration values on the unit label therefore do not conflict with its 8000 SCCM process-gas range.

Calibration-label test points

The Brooks label records six nitrogen calibration points at a 35 psig test pressure.

Calibration pointN2 flow shown
5%1481.64 SCCM
10%2981.61 SCCM
25%7470.05 SCCM
50%15058.68 SCCM
75%22513.43 SCCM
100%30014.49 SCCM

DeviceNet CSR 0924 mapping

The exact unit label carries CSR 0924. Brooks' MultiFlo guide maps this common DeviceNet configuration as follows.

Full-scale representation0x6000
Producer assembly2
Consumer assembly7

Configuration boundary

The short Brooks part number and visible label do not expose every position in the complete configurable product-description code.

Documentation Downloads

Local PDF copies

Part Photos

5 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records1Tracked historical listing records
Historical median price$175.00Based on archived listing records
Recorded price range$175.00 - $175.00Low to high recorded listing price
Local documents4PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $175.00 to $175.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • USED Brooks GF100C-861729 GF Series Thermal Mass Flowmeter 8000 SCCM

Archived listings

Other Part Numbers & Aliases

GF100C-861729Brooks GF100C-861729Brooks Instrument GF100C-861729