Flow Control
GF100C-853265
Brooks Instrument GF100CXXC Metal-Sealed Thermal Mass Flow Controller
About this part
GF100C-853265 is a configured Brooks Instrument GF100-series thermal mass flow controller. Exact-identifier evidence associates it with model marking GF100CXXC. Under Brooks’ published model-code structure, that marking identifies the standard-performance, non-PTI GF100 platform with MultiFlo capability, no specialty application, and a normally closed control valve. The identifier does not establish the configured gas, full-scale range, fitting, downstream condition, connector, communications protocol, customer-special requirement, or calibration settings
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Instrument, LLC |
| Manufacturer part number | GF100C-853265 |
| Observed model marking | GF100CXXC |
| Device type | Metal-sealed thermal mass flow controller for gases |
| Performance platform | GF100 standard-performance, non-pressure-transient-insensitive platform |
| Configurability | MultiFlo-capable configuration |
| Special application | Standard configuration; no SDS or high-temperature specialty code |
| Valve configuration | Normally closed control valve |
| Flow-package envelope | GF100 package code covers 3 sccm through 55 slpm N2-equivalent; the configured full-scale value for GF100C-853265 is not established |
| Wetted surface-finish class | 10 microinch Ra GF100 package context |
| Settling time | Less than 1 second for GF100 configurations with a normally closed valve |
| Control range | 2-100% for normally closed-valve configurations |
| Operating temperature | 10-50 °C |
| Maximum operating pressure | 500 psia maximum |
| External leak integrity | 1 × 10^-10 atm·cc/s helium |
| Wetted path | High-purity all-metal flow path with SEMI F20 HP-compliant wetted materials; the exact material combination depends on configuration |
| Diagnostic/service port | RS-485 through a 2.5 mm service jack |
Model-code interpretation
Only the published GF100CXXC portion can be decoded; the remaining configured attributes require the full product-description code or a legible unit label.
| Code segment | Manufacturer meaning | Applicability |
|---|---|---|
| GF | High-purity/ultra-high-purity digital mass flow controller family | Applies to the observed model marking |
| 100 | Standard-performance, non-PTI package; 3 sccm-55 slpm N2-equivalent envelope, less-than-1-second response, and 10 microinch Ra finish context | Applies at model-package level; not a configured full-scale value |
| C | MultiFlo capable | Applies to the observed model marking |
| XX | Standard configuration without a specialty-application code | Applies to the observed model marking |
| C | Normally closed valve | Applies to the observed model marking |
| -853265 | Configured Brooks manufacturer part identifier | No public Brooks table was identified that decodes this suffix into gas, range, fitting, or electrical options |
Configuration boundary
GF100CXXC is not the complete Brooks product-description code.
Installation and reuse cautions
Brooks’ installation manual gives configuration-dependent handling requirements for GF100-series devices.
- Identify the fitting type before installation; downported configurations use metal C-seals or W-seals that must be replaced after each installation.
- Purge the gas supply line appropriately before installing a unit previously exposed to process gas.
- Leak-test the gas connections before introducing process gas.
- Verify the configured gas, range, operating pressure, mounting attitude, and electrical interface from the unit label before commissioning.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $399.99 to $399.99. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument GF Series Thermal Mass Flow GF100C-853265. (h0924)