Flow Control
GF100C-202583
Brooks Instrument GF100 Metal-Sealed Mass Flow Controller
About this part
Brooks Instrument GF100C-202583 is an exact configured-unit identifier associated with a GF100 Series metal-sealed thermal mass flow controller for high-purity gas service. The GF100C stem is consistent with Brooks’ ordering fields for the standard-flow GF100 package and MultiFlo-capable configurability. The six-digit suffix is not a field in the published ordering code, so the exact gas, full-scale range, valve, fitting, downstream condition, communications interface, and calibration cannot be decoded from this identifier alone
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Exact configured-unit identifier | GF100C-202583 |
| Series | GF100 Series |
| Measurement principle | Thermal mass flow measurement and control for gases |
| Published code interpretation | The GF100C stem corresponds to the GF100 standard-flow package followed by the MultiFlo-capable configurability code; the remaining configured ordering fields are not present in the abbreviated identifier |
| GF100 model envelope | 3 sccm to 55 slpm nitrogen-equivalent full scale; the exact configured gas and full-scale range are not established for GF100C-202583 |
| MultiFlo capability | The C configurability code supports standard MultiFlo bins or a selected gas and range; it does not disclose the unit’s current gas or range |
| Operating temperature | 10 to 50 °C for standard GF100 configurations |
| Maximum operating pressure | 500 psia maximum for the GF100 model context |
| External leak integrity | 1 × 10^-10 atm·cc/s helium in the current GF100 family data sheets |
| Pressure-transient-insensitive designation | Not assigned to GF100 in the model-specific performance table; Brooks assigns the PTI model designation to GF125/GF126 configurations |
| Flow-path construction | Metal-sealed, high-purity all-metal flow path |
| GF100 surface finish | 10 µin Ra in the current GF100 ordering table |
| Wetted-material context | SEMI F20 HP-compliant materials comprising 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, and KM-45; PCTFE is present only with the optional Zero Leak-by valve |
| Possible communications | Analog/RS-485, DeviceNet, or EtherCAT depending on the full communications/connector code; the installed interface is unresolved for GF100C-202583 |
| Manufacturer application context | Semiconductor etch, thin-film deposition, epitaxial, advanced-strip, MOCVD, and other high-purity process-gas systems |
Published identifier interpretation
Only the GF100C stem can be related conservatively to Brooks’ public ordering table.
Interface-dependent published performance
Brooks publishes different performance and electrical details for analog/DeviceNet and EtherCAT implementations. The exact interface must be established before applying either column to GF100C-202583.
| Characteristic | Analog/DeviceNet data sheet, 2025-07 | EtherCAT data sheet, 2024-10 |
|---|---|---|
| Flow accuracy based on factory N2 calibration | ±1% of set point above 35–100% full scale; ±0.35% full scale over 2–35% | ±1% of set point above 20–100% full scale; ±0.2% full scale over 2–20% |
| Repeatability and reproducibility | ±0.15% of set point from 5–100%; ±0.015% full scale from 2–5% | ±0.15% of set point from 5–100%; ±0.015% full scale from 2–5% |
| Zero stability | Less than ±0.5% full scale per year | Less than ±0.15% full scale per year |
| Normally closed GF100 settling time | Less than 1 second | Less than 1 second |
| Electrical interface | 9-pin D analog/RS-485 or 5-pin M12 DeviceNet, according to option | EtherCAT through RJ45 jacks; power through a 5-pin M8 connector |
| Diagnostic/service port | RS-485 through 2.5 mm jack | Micro-USB |
Configuration verification boundary
These fields require the complete ordering code, manufacturer configuration record, or a legible unit label.
- Configured gas and full-scale flow range
- Normally open valve, normally closed valve, Zero Leak-by valve, or meter construction
- MultiFlo sensor bin
- Fitting type, body width, and footprint
- Atmospheric or vacuum downstream calibration
- Communications and electrical connector option
- Customer Special Request number and secondary customer/OEM number
- Auto-shutoff, auto-zero, and reference-temperature selections
MultiFlo service note
Brooks continues to provide the MultiFlo Configurator as a legacy Windows application but states that it is no longer supported. Reconfiguration should be performed only on an applicable MultiFlo-capable device, using the correct hardware and current gas databases, with the existing configuration recorded before changes are made.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,811.24 to $1,811.24. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument GF100C-202583 Mass Flow Controller 0190-83990 Lot of 2 New