GF100C-101974 is a configured Brooks Instrument GF100 Series metal-sealed thermal mass flow controller observed in Sonisys auction records as a 15000 SCCM nitrogen unit. Brooks GF100 family documentation describes high-purity and ultra-high-purity thermal mass flow controllers and meters for semiconductor, MOCVD, and other gas flow control applications that require an all-metal flow path. Exact gas calibration, flow range, valve state, fittings, communication protocol, seal package, and process options must be verified from the physical unit label and configuration documentation
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF100C-101974
Device type
Metal-sealed thermal mass flow controller
Manufacturer family
Brooks Instrument GF100 Series
Related series family
GF100 / GF101 / GF120 / GF120XSD / GF120XSL / GF121 / GF125 / GF126 metal-sealed mass flow controller and meter family
Applications
Application domain
Semiconductor, MOCVD, thin-film, and high-purity gas flow control
Flow-path context
GF100 Series devices are designed for applications requiring a high-purity all-metal flow path
Flow
Observed stored-auction gas
Nitrogen / N2
Observed stored-auction full-scale range
15000 SCCM
Gas/range programmability
MultiFlo gas and range programmability is supported on applicable GF100-family configurations
Performance
Flow accuracy
GF100 analog and DeviceNet documentation lists +/-1% of set point from 35% to 100% full scale and +/-0.35% full scale from 2% to 35% full scale based on factory N2 calibration
Settling time
Normally closed valve response ranges from 300 ms to less than 700 ms over listed GF100 / GF125 flow bins
Pressure transient insensitivity
GF100 family documentation describes pressure transient insensitivity for more stable mass flow delivery in semiconductor gas systems
Materials
Wetted path standard
SEMI F20 HP compliant wetted materials
Sensor context
GF100 family documentation describes a corrosion-resistant Hastelloy sensor for long-term sensor stability
Controls
Communication interfaces
Analog / RS-485, DeviceNet, or EtherCAT depending on configuration
Service
Diagnostics context
GF100 documentation describes an independent diagnostic / service port for troubleshooting or changing flow conditions without removing the device from service
Configuration
Configured-unit rule
Gas, range, communication interface, valve state, fitting package, seal package, surface finish, connector style, and process options vary by configured model code and must be read from the unit label
Documents
Hosted official documentation
Sonisys hosts local copies of Brooks GF100 Series data, installation, and MultiFlo documentation for reference
