Flow Control
GF100-102561
Brooks Instrument GF100 Series Metal-Sealed Thermal Mass Flow Device
About this part
GF100-102561 identifies a Brooks Instrument device in the GF100 standard-performance, non-pressure-transient-insensitive line of high-purity thermal gas-flow devices. The available identifier does not distinguish a controller from a meter or disclose the published long-form configuration code. Gas, calibrated full-scale range, valve configuration, fitting, communications interface, and MultiFlo capability therefore require the physical label or a Brooks build record
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Configured identifier | GF100-102561 |
| Base model | GF100 |
| Device class | Metal-sealed high-purity or ultra-high-purity thermal mass flow controller or meter for gases; the available identifier does not establish whether this unit has a control valve |
| GF100 performance class | Standard-performance, non-pressure-transient-insensitive model within the GF100 Series |
| Flow accuracy by communications platform | Published GF100 performance is interface-dependent. Analog/DeviceNet configurations are listed at ±1% of set point over >35-100% full scale and ±0.35% full scale over 2-35%. EtherCAT configurations are listed at ±1% of set point over >20-100% full scale and ±0.2% full scale over 2-20%. Values are based on factory N2 calibration; the installed interface is unverified |
| Repeatability and reproducibility | Published GF100 value: ±0.15% of set point over 5-100% full scale and ±0.015% full scale over 2-5% |
| Settling time | Less than 1 second for a GF100 configuration with a normally closed valve; applicability depends on the installed valve configuration |
| Pressure-transient insensitivity | Not applicable to the GF100 base model; Brooks assigns pressure-transient-insensitive operation to GF125 configurations |
| GF100 full-scale range envelope | 3 sccm to 55 slpm N2 equivalent. This is the published GF100 model envelope, not the verified configured range of GF100-102561 |
| MultiFlo capability | MultiFlo is selected by the published C configurability option. GF100-102561 does not expose that option, so MultiFlo capability is not established for this unit |
| Wetted path | The GF100 tables specify SEMI F20 HP-compliant wetted materials and list 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, and KM-45. PCTFE is associated only with the optional Zero Leak-by valve |
| Surface finish | The published GF100 package code specifies 10 µin Ra |
| Operating temperature | 10-50 °C for standard GF100 configurations |
| Maximum operating pressure | 500 psia maximum in the current GF100 specification tables |
| Available communications platforms | Analog/RS-485, DeviceNet, and EtherCAT configurations are documented for the GF100 line. The installed platform cannot be determined from GF100-102561 |
| Application domain | The GF100 Series is intended for semiconductor, MOCVD, thin-film, and other high-purity gas-flow applications |
Configuration interpretation
The six-digit suffix is not the long-form option code published in Brooks ordering tables and cannot be used to infer the installed configuration.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $499.00 to $499.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- NEW - BROOKS Instruments Thermal Mass Flow GF Series GF100-102561 280 SCCM - NEW