Flow Control

SLA5861E1PAA0A2A4

Brooks Instrument SLA5861 Digital Mass Flow Meter

About this part

SLA5861E1PAA0A2A4 is a configured Brooks Instrument SLA5861 digital thermal mass flow meter in the SLA5800 Series. Official SLA5800 documentation identifies SLA5860, SLA5861, and SLA5863 as mass flow meter models, while SLA5850, SLA5851, and SLA5853 are controller models. Stored Sonisys auction records associate this exact identifier with N2 150 SLPM context; exact calibration, communication, fitting, and seal details should be verified from the unit label

Unit-specific configuration
Observed configuration

Historical listing records identify this part as N2 at 150 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

No archived photo available

Key Facts

ManufacturerBrooks Instrument
Part numberSLA5861E1PAA0A2A4
Product familySLA5800 Series
Device typeFlow Meter
Observed gasN2
Observed full-scale range150 SLM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Device typeElastomer-sealed digital thermal mass flow meter
Series familyBrooks SLA5800 Series elastomer-sealed digital thermal mass flow controllers and meters
Model roleSLA5861 is the SLA5800 Series mass-flow-meter counterpart for 20 to 100 lpm N2 equivalent ranges, with up to 200 lpm H2 flows possible in the documented model family
Configuration
Configured-unit ruleGas, full-scale range, process connections, seals, valve state, power, and digital communications vary by configured code
Performance
Series accuracy contextSLA5800 data-sheet accuracy is listed as +/-1.0% of rate from 20-100% full scale plus +/-0.2% full scale below 20% full scale up to 1100 lpm N2 equivalent
RepeatabilitySLA5800 data sheet lists repeatability as +/-0.20% of rate
Response timeSLA5800 data sheet lists less than 1 second to within +/-2% full scale for a 0-100% command step through 100 lpm N2 equivalent, and less than 3 seconds above 100 lpm through 2500 lpm
Controls
Digital platformSLA5800 devices support analog and digital I/O options depending on configuration
Flow
Gas/range programmabilityThe SLA5800 platform supports storage of selectable calibration curves and MultiFlo-related gas/range flexibility on applicable configurations
Applications
Application domainAdvanced gas handling, production, laboratory, analytical, fuel-cell, life-science, and process gas control applications
Observed variants
Stored auction gas/range combinationsStored Sonisys titles identify SLA5861E1PAA0A2A4 with N2 150 SLPM context

Documentation Downloads

Local PDF copies

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records5Tracked historical listing records
Historical median price$299.00Based on archived listing records
Recorded price range$299.00 - $399.00Low to high recorded listing price
Local documents4PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $299.00 to $399.00. Based on 5 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks SLA5800 Series SLA5861E1PAA0A2A4 N2 150SLPM Thermal Mass Flow Controller

Archived listings

Other Part Numbers & Aliases

SLA5861E1PAA0A2A4Brooks SLA5861E1PAA0A2A4Brooks Instrument SLA5861E1PAA0A2A4