Brooks Instrument SLA5851 Digital Mass Flow Controller
About this part
SLA5851SD1AB1B2A1 is a configured Brooks Instrument SLA5851 digital thermal mass flow controller in the SLA5800 Series. Official Brooks SLA5800 documentation identifies SLA5851 as an elastomer-sealed controller platform for gas mass-flow measurement and control, with configured gas, full-scale range, process connections, elastomers, valve, power, and communications determined by the complete order code and unit label. auction evidence for this exact identifier has shown N2 100 SLPM and 0-5 V I/O context, so the physical nameplate remains authoritative for calibration-specific details
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2 at 100 SLPM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Elastomer-sealed digital thermal mass flow controller
Series family
Brooks SLA5800 Series elastomer-sealed digital thermal mass flow controllers and meters
Model role
SLA5851 is the mid-flow SLA5800 Series mass flow controller platform; the Brooks data sheet lists SLA5851 controller ranges from 20 to 100 lpm N2 equivalent, with up to 200 lpm H2 possible
Configured part identifier
SLA5851SD1AB1B2A1
Configuration
Configured-unit rule
Gas, full-scale range, process connections, seals, valve state, power, and digital communications vary by configured code and unit label
Performance
Series accuracy context
SLA5800 data-sheet accuracy is listed as +/-1.0% of rate from 20-100% full scale plus +/-0.2% full scale below 20% full scale up to 1100 lpm N2 equivalent
Repeatability
SLA5800 data sheet lists repeatability as +/-0.20% of rate
Response time
SLA5800 data sheet lists less than 1 second to within +/-2% full scale for a 0-100% command step through 100 lpm N2 equivalent, and less than 3 seconds above 100 lpm through 2500 lpm
Ratings
Pressure rating context
For SLA5851/SLA5861, the Brooks data sheet lists 100 bar/1500 psi pressure rating, with 70 bar/1000 psi for UL certification; optional 300 bar/4500 psi applies to selected 50/60/61 series bodies
Controls
Digital platform
SLA5800 devices support analog and digital I/O options depending on configuration, including analog/RS-485, DeviceNet, and FOUNDATION Fieldbus variants documented for the series
Flow
Stored calibration capability
SLA5800 documentation describes storage of up to ten selectable calibration curves; ordered calibrations determine which curves are available in a configured instrument
Applications
Application domain
Advanced gas handling, production, laboratory, analytical, fuel-cell, life-science, and process gas control applications
Observed variants
Observed exact-part nameplate context
A auction listing for SLA5851SD1AB1B2A1 has shown N2 gas, 100 SLPM full-scale flow, 0-5 V I/O, and 20 C reference context; treat these as observed unit details, not universal specifications for every SLA5851 configuration
